7/28/2010	12:47:45 AM	Tube furnace set to 100
7/28/2010	12:47:50 AM	Bypass valve closed
7/28/2010	12:47:50 AM	Main Vac valve closed
7/28/2010	12:47:58 AM	Main Vac valve opened
7/28/2010	12:47:58 AM	Bypass valve opened
7/28/2010	12:48:54 AM	Tube furnace set to 0
7/28/2010	12:49:01 AM	Recipe started at 12:49 AM
7/28/2010	12:49:01 AM	Helium valve closed
7/28/2010	12:49:01 AM	BCl3 valve closed
7/28/2010	12:49:01 AM	PH3 valve closed
7/28/2010	12:49:01 AM	SiCl4 pre valve closed
7/28/2010	12:49:01 AM	SiCl4 post valve closed
7/28/2010	12:49:01 AM	Main Vac valve closed
7/28/2010	12:49:01 AM	Bypass valve closed
7/28/2010	12:49:01 AM	Bubbler valve closed
7/28/2010	12:49:01 AM	H2 valve opened
7/28/2010	12:49:01 AM	Helium MFC set to  0.000000
7/28/2010	12:49:01 AM	H2 MFC set to  500.000000
7/28/2010	12:49:01 AM	BCl3 MFC set to  0.000000
7/28/2010	12:49:01 AM	PHl3 MFC set to  0.000000
7/28/2010	12:49:01 AM	SiCl4 MFC set to  0.000000
7/28/2010	12:49:01 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	12:49:01 AM	Tube furnace set to 100
7/28/2010	12:50:23 AM	Helium valve closed
7/28/2010	12:50:23 AM	BCl3 valve closed
7/28/2010	12:50:23 AM	PH3 valve closed
7/28/2010	12:50:23 AM	SiCl4 pre valve closed
7/28/2010	12:50:23 AM	SiCl4 post valve closed
7/28/2010	12:50:23 AM	Main Vac valve closed
7/28/2010	12:50:23 AM	Bypass valve closed
7/28/2010	12:50:23 AM	H2 valve opened
7/28/2010	12:50:23 AM	Bubbler valve opened
7/28/2010	12:50:23 AM	Helium MFC set to  0.000000
7/28/2010	12:50:23 AM	H2 MFC set to  500.000000
7/28/2010	12:50:23 AM	BCl3 MFC set to  0.000000
7/28/2010	12:50:23 AM	PHl3 MFC set to  0.000000
7/28/2010	12:50:23 AM	SiCl4 MFC set to  0.000000
7/28/2010	12:50:23 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	12:50:23 AM	Tube furnace set to 1000
7/28/2010	1:10:23 AM	Helium valve closed
7/28/2010	1:10:23 AM	PH3 valve closed
7/28/2010	1:10:23 AM	Main Vac valve closed
7/28/2010	1:10:23 AM	Bypass valve closed
7/28/2010	1:10:23 AM	H2 valve opened
7/28/2010	1:10:23 AM	BCl3 valve opened
7/28/2010	1:10:23 AM	SiCl4 pre valve opened
7/28/2010	1:10:23 AM	SiCl4 post valve opened
7/28/2010	1:10:23 AM	Bubbler valve opened
7/28/2010	1:10:23 AM	Helium MFC set to  0.000000
7/28/2010	1:10:23 AM	H2 MFC set to  500.000000
7/28/2010	1:10:23 AM	BCl3 MFC set to  15.000000
7/28/2010	1:10:23 AM	PHl3 MFC set to  0.000000
7/28/2010	1:10:23 AM	SiCl4 MFC set to  50.000000
7/28/2010	1:10:23 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	1:10:23 AM	Tube furnace set to 1000
7/28/2010	1:15:23 AM	H2 valve closed
7/28/2010	1:15:23 AM	BCl3 valve closed
7/28/2010	1:15:23 AM	PH3 valve closed
7/28/2010	1:15:23 AM	SiCl4 pre valve closed
7/28/2010	1:15:23 AM	SiCl4 post valve closed
7/28/2010	1:15:23 AM	Main Vac valve closed
7/28/2010	1:15:23 AM	Bypass valve closed
7/28/2010	1:15:23 AM	Helium valve opened
7/28/2010	1:15:23 AM	Bubbler valve opened
7/28/2010	1:15:23 AM	Helium MFC set to  500.000000
7/28/2010	1:15:23 AM	H2 MFC set to  0.000000
7/28/2010	1:15:23 AM	BCl3 MFC set to  0.000000
7/28/2010	1:15:23 AM	PHl3 MFC set to  0.000000
7/28/2010	1:15:23 AM	SiCl4 MFC set to  0.000000
7/28/2010	1:15:23 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	1:15:23 AM	Tube furnace set to 0
7/28/2010	1:35:23 AM	Helium valve closed
7/28/2010	1:35:23 AM	H2 valve closed
7/28/2010	1:35:23 AM	BCl3 valve closed
7/28/2010	1:35:23 AM	PH3 valve closed
7/28/2010	1:35:23 AM	SiCl4 pre valve closed
7/28/2010	1:35:23 AM	SiCl4 post valve closed
7/28/2010	1:35:23 AM	Main Vac valve closed
7/28/2010	1:35:23 AM	Bypass valve closed
7/28/2010	1:35:23 AM	Bubbler valve closed
7/28/2010	1:35:23 AM	Helium MFC set to  0.000000
7/28/2010	1:35:23 AM	H2 MFC set to  0.000000
7/28/2010	1:35:23 AM	BCl3 MFC set to  0.000000
7/28/2010	1:35:23 AM	PHl3 MFC set to  0.000000
7/28/2010	1:35:23 AM	SiCl4 MFC set to  0.000000
7/28/2010	1:35:23 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	1:35:23 AM	Tube furnace set to 0
7/28/2010	1:35:24 AM	Run finished at 1:35 AM
7/28/2010	3:14:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2010	3:14:10 AM	Recipe started at 3:14 AM
7/28/2010	3:14:10 AM	Helium valve closed
7/28/2010	3:14:10 AM	H2 valve closed
7/28/2010	3:14:10 AM	BCl3 valve closed
7/28/2010	3:14:10 AM	PH3 valve closed
7/28/2010	3:14:10 AM	SiCl4 pre valve closed
7/28/2010	3:14:10 AM	SiCl4 post valve closed
7/28/2010	3:14:10 AM	Main Vac valve closed
7/28/2010	3:14:10 AM	Bubbler valve closed
7/28/2010	3:14:10 AM	Bypass valve opened
7/28/2010	3:14:10 AM	Helium MFC set to  0.000000
7/28/2010	3:14:10 AM	H2 MFC set to  0.000000
7/28/2010	3:14:10 AM	BCl3 MFC set to  0.000000
7/28/2010	3:14:10 AM	PHl3 MFC set to  0.000000
7/28/2010	3:14:10 AM	SiCl4 MFC set to  0.000000
7/28/2010	3:14:10 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	3:14:10 AM	Tube furnace set to 0
7/28/2010	3:14:44 AM	Helium valve closed
7/28/2010	3:14:45 AM	H2 valve closed
7/28/2010	3:14:45 AM	BCl3 valve closed
7/28/2010	3:14:45 AM	PH3 valve closed
7/28/2010	3:14:45 AM	SiCl4 pre valve closed
7/28/2010	3:14:45 AM	SiCl4 post valve closed
7/28/2010	3:14:45 AM	Bubbler valve closed
7/28/2010	3:14:45 AM	Main Vac valve opened
7/28/2010	3:14:45 AM	Bypass valve opened
7/28/2010	3:14:45 AM	Helium MFC set to  0.000000
7/28/2010	3:14:45 AM	H2 MFC set to  0.000000
7/28/2010	3:14:45 AM	BCl3 MFC set to  0.000000
7/28/2010	3:14:45 AM	PHl3 MFC set to  0.000000
7/28/2010	3:14:45 AM	SiCl4 MFC set to  0.000000
7/28/2010	3:14:45 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	3:14:45 AM	Tube furnace set to 0
7/28/2010	3:14:45 AM	Run finished at 3:14 AM
7/28/2010	3:14:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2010	3:27:01 AM	Helium MFC set to  100.000000
7/28/2010	3:27:03 AM	Helium valve opened
7/28/2010	3:33:13 AM	Helium valve closed
7/28/2010	3:33:15 AM	Helium MFC set to  0.000000
7/28/2010	3:34:39 AM	Bypass valve closed
7/28/2010	3:34:39 AM	Main Vac valve closed
7/28/2010	3:34:43 AM	Main Vac valve opened
7/28/2010	3:34:44 AM	Bypass valve opened
7/28/2010	3:34:53 AM	Helium valve opened
7/28/2010	3:34:53 AM	Helium valve closed
7/28/2010	3:37:25 AM	Recipe started at 3:37 AM
7/28/2010	3:37:25 AM	Helium valve closed
7/28/2010	3:37:25 AM	BCl3 valve closed
7/28/2010	3:37:25 AM	PH3 valve closed
7/28/2010	3:37:25 AM	SiCl4 pre valve closed
7/28/2010	3:37:25 AM	SiCl4 post valve closed
7/28/2010	3:37:25 AM	Main Vac valve closed
7/28/2010	3:37:25 AM	Bypass valve closed
7/28/2010	3:37:25 AM	Bubbler valve closed
7/28/2010	3:37:25 AM	H2 valve opened
7/28/2010	3:37:25 AM	Helium MFC set to  0.000000
7/28/2010	3:37:25 AM	H2 MFC set to  500.000000
7/28/2010	3:37:25 AM	BCl3 MFC set to  0.000000
7/28/2010	3:37:25 AM	PHl3 MFC set to  0.000000
7/28/2010	3:37:25 AM	SiCl4 MFC set to  0.000000
7/28/2010	3:37:25 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	3:37:25 AM	Tube furnace set to 100
7/28/2010	3:38:44 AM	Helium valve closed
7/28/2010	3:38:44 AM	BCl3 valve closed
7/28/2010	3:38:44 AM	PH3 valve closed
7/28/2010	3:38:44 AM	SiCl4 pre valve closed
7/28/2010	3:38:44 AM	SiCl4 post valve closed
7/28/2010	3:38:44 AM	Main Vac valve closed
7/28/2010	3:38:44 AM	Bypass valve closed
7/28/2010	3:38:44 AM	H2 valve opened
7/28/2010	3:38:44 AM	Bubbler valve opened
7/28/2010	3:38:44 AM	Helium MFC set to  0.000000
7/28/2010	3:38:44 AM	H2 MFC set to  500.000000
7/28/2010	3:38:44 AM	BCl3 MFC set to  0.000000
7/28/2010	3:38:44 AM	PHl3 MFC set to  0.000000
7/28/2010	3:38:44 AM	SiCl4 MFC set to  0.000000
7/28/2010	3:38:44 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	3:38:44 AM	Tube furnace set to 1000
7/28/2010	3:58:44 AM	Helium valve closed
7/28/2010	3:58:44 AM	PH3 valve closed
7/28/2010	3:58:44 AM	Main Vac valve closed
7/28/2010	3:58:44 AM	Bypass valve closed
7/28/2010	3:58:44 AM	H2 valve opened
7/28/2010	3:58:44 AM	BCl3 valve opened
7/28/2010	3:58:44 AM	SiCl4 pre valve opened
7/28/2010	3:58:44 AM	SiCl4 post valve opened
7/28/2010	3:58:44 AM	Bubbler valve opened
7/28/2010	3:58:44 AM	Helium MFC set to  0.000000
7/28/2010	3:58:44 AM	H2 MFC set to  500.000000
7/28/2010	3:58:44 AM	BCl3 MFC set to  15.000000
7/28/2010	3:58:44 AM	PHl3 MFC set to  0.000000
7/28/2010	3:58:44 AM	SiCl4 MFC set to  50.000000
7/28/2010	3:58:44 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	3:58:44 AM	Tube furnace set to 1000
7/28/2010	4:04:44 AM	H2 valve closed
7/28/2010	4:04:44 AM	BCl3 valve closed
7/28/2010	4:04:44 AM	PH3 valve closed
7/28/2010	4:04:44 AM	SiCl4 pre valve closed
7/28/2010	4:04:44 AM	SiCl4 post valve closed
7/28/2010	4:04:44 AM	Main Vac valve closed
7/28/2010	4:04:44 AM	Bypass valve closed
7/28/2010	4:04:44 AM	Helium valve opened
7/28/2010	4:04:44 AM	Bubbler valve opened
7/28/2010	4:04:44 AM	Helium MFC set to  500.000000
7/28/2010	4:04:44 AM	H2 MFC set to  0.000000
7/28/2010	4:04:44 AM	BCl3 MFC set to  0.000000
7/28/2010	4:04:44 AM	PHl3 MFC set to  0.000000
7/28/2010	4:04:44 AM	SiCl4 MFC set to  0.000000
7/28/2010	4:04:44 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	4:04:44 AM	Tube furnace set to 0
7/28/2010	4:24:44 AM	Helium valve closed
7/28/2010	4:24:44 AM	H2 valve closed
7/28/2010	4:24:44 AM	BCl3 valve closed
7/28/2010	4:24:44 AM	PH3 valve closed
7/28/2010	4:24:44 AM	SiCl4 pre valve closed
7/28/2010	4:24:44 AM	SiCl4 post valve closed
7/28/2010	4:24:44 AM	Main Vac valve closed
7/28/2010	4:24:44 AM	Bypass valve closed
7/28/2010	4:24:44 AM	Bubbler valve closed
7/28/2010	4:24:44 AM	Helium MFC set to  0.000000
7/28/2010	4:24:44 AM	H2 MFC set to  0.000000
7/28/2010	4:24:44 AM	BCl3 MFC set to  0.000000
7/28/2010	4:24:44 AM	PHl3 MFC set to  0.000000
7/28/2010	4:24:44 AM	SiCl4 MFC set to  0.000000
7/28/2010	4:24:44 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	4:24:44 AM	Tube furnace set to 0
7/28/2010	4:24:45 AM	Run finished at 4:24 AM
7/28/2010	7:42:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/28/2010	7:42:11 AM	Recipe started at 7:42 AM
7/28/2010	7:42:11 AM	Helium valve closed
7/28/2010	7:42:11 AM	H2 valve closed
7/28/2010	7:42:11 AM	BCl3 valve closed
7/28/2010	7:42:11 AM	PH3 valve closed
7/28/2010	7:42:11 AM	SiCl4 pre valve closed
7/28/2010	7:42:11 AM	SiCl4 post valve closed
7/28/2010	7:42:11 AM	Main Vac valve closed
7/28/2010	7:42:11 AM	Bypass valve closed
7/28/2010	7:42:11 AM	Bubbler valve closed
7/28/2010	7:42:11 AM	Helium MFC set to  0.000000
7/28/2010	7:42:11 AM	H2 MFC set to  0.000000
7/28/2010	7:42:11 AM	BCl3 MFC set to  0.000000
7/28/2010	7:42:11 AM	PHl3 MFC set to  0.000000
7/28/2010	7:42:11 AM	SiCl4 MFC set to  0.000000
7/28/2010	7:42:11 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	7:42:11 AM	Tube furnace set to 0
7/28/2010	7:42:11 AM	Run finished at 7:42 AM
7/28/2010	7:42:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/28/2010	7:42:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2010	7:42:16 AM	Recipe started at 7:42 AM
7/28/2010	7:42:16 AM	Helium valve closed
7/28/2010	7:42:16 AM	H2 valve closed
7/28/2010	7:42:16 AM	BCl3 valve closed
7/28/2010	7:42:16 AM	PH3 valve closed
7/28/2010	7:42:16 AM	SiCl4 pre valve closed
7/28/2010	7:42:16 AM	SiCl4 post valve closed
7/28/2010	7:42:16 AM	Main Vac valve closed
7/28/2010	7:42:16 AM	Bubbler valve closed
7/28/2010	7:42:16 AM	Bypass valve opened
7/28/2010	7:42:16 AM	Helium MFC set to  0.000000
7/28/2010	7:42:16 AM	H2 MFC set to  0.000000
7/28/2010	7:42:16 AM	BCl3 MFC set to  0.000000
7/28/2010	7:42:16 AM	PHl3 MFC set to  0.000000
7/28/2010	7:42:16 AM	SiCl4 MFC set to  0.000000
7/28/2010	7:42:16 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	7:42:16 AM	Tube furnace set to 0
7/28/2010	7:42:42 AM	Helium valve closed
7/28/2010	7:42:42 AM	H2 valve closed
7/28/2010	7:42:42 AM	BCl3 valve closed
7/28/2010	7:42:42 AM	PH3 valve closed
7/28/2010	7:42:42 AM	SiCl4 pre valve closed
7/28/2010	7:42:42 AM	SiCl4 post valve closed
7/28/2010	7:42:42 AM	Bubbler valve closed
7/28/2010	7:42:42 AM	Main Vac valve opened
7/28/2010	7:42:42 AM	Bypass valve opened
7/28/2010	7:42:42 AM	Helium MFC set to  0.000000
7/28/2010	7:42:42 AM	H2 MFC set to  0.000000
7/28/2010	7:42:42 AM	BCl3 MFC set to  0.000000
7/28/2010	7:42:42 AM	PHl3 MFC set to  0.000000
7/28/2010	7:42:42 AM	SiCl4 MFC set to  0.000000
7/28/2010	7:42:42 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	7:42:43 AM	Tube furnace set to 0
7/28/2010	7:42:43 AM	Run finished at 7:42 AM
7/28/2010	7:42:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2010	7:49:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/28/2010	7:49:47 AM	Recipe started at 7:49 AM
7/28/2010	7:49:47 AM	H2 valve closed
7/28/2010	7:49:47 AM	BCl3 valve closed
7/28/2010	7:49:47 AM	PH3 valve closed
7/28/2010	7:49:47 AM	SiCl4 pre valve closed
7/28/2010	7:49:47 AM	SiCl4 post valve closed
7/28/2010	7:49:47 AM	Main Vac valve closed
7/28/2010	7:49:47 AM	Bypass valve closed
7/28/2010	7:49:47 AM	Bubbler valve closed
7/28/2010	7:49:47 AM	Helium valve opened
7/28/2010	7:49:47 AM	Helium MFC set to  500.000000
7/28/2010	7:49:47 AM	H2 MFC set to  0.000000
7/28/2010	7:49:47 AM	BCl3 MFC set to  0.000000
7/28/2010	7:49:47 AM	PHl3 MFC set to  0.000000
7/28/2010	7:49:47 AM	SiCl4 MFC set to  0.000000
7/28/2010	7:49:47 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	7:49:47 AM	Tube furnace set to 0
7/28/2010	7:51:07 AM	Helium valve closed
7/28/2010	7:51:07 AM	H2 valve closed
7/28/2010	7:51:07 AM	BCl3 valve closed
7/28/2010	7:51:07 AM	PH3 valve closed
7/28/2010	7:51:07 AM	SiCl4 pre valve closed
7/28/2010	7:51:07 AM	SiCl4 post valve closed
7/28/2010	7:51:07 AM	Main Vac valve closed
7/28/2010	7:51:07 AM	Bypass valve closed
7/28/2010	7:51:07 AM	Bubbler valve closed
7/28/2010	7:51:07 AM	Helium MFC set to  0.000000
7/28/2010	7:51:07 AM	H2 MFC set to  0.000000
7/28/2010	7:51:07 AM	BCl3 MFC set to  0.000000
7/28/2010	7:51:07 AM	PHl3 MFC set to  0.000000
7/28/2010	7:51:07 AM	SiCl4 MFC set to  0.000000
7/28/2010	7:51:07 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	7:51:07 AM	Tube furnace set to 0
7/28/2010	7:51:07 AM	Run finished at 7:51 AM
7/28/2010	7:51:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/28/2010	8:03:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2010	8:03:08 AM	Recipe started at 8:03 AM
7/28/2010	8:03:08 AM	Helium valve closed
7/28/2010	8:03:08 AM	H2 valve closed
7/28/2010	8:03:08 AM	BCl3 valve closed
7/28/2010	8:03:08 AM	PH3 valve closed
7/28/2010	8:03:08 AM	SiCl4 pre valve closed
7/28/2010	8:03:08 AM	SiCl4 post valve closed
7/28/2010	8:03:08 AM	Main Vac valve closed
7/28/2010	8:03:08 AM	Bubbler valve closed
7/28/2010	8:03:08 AM	Bypass valve opened
7/28/2010	8:03:08 AM	Helium MFC set to  0.000000
7/28/2010	8:03:08 AM	H2 MFC set to  0.000000
7/28/2010	8:03:08 AM	BCl3 MFC set to  0.000000
7/28/2010	8:03:08 AM	PHl3 MFC set to  0.000000
7/28/2010	8:03:08 AM	SiCl4 MFC set to  0.000000
7/28/2010	8:03:08 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	8:03:09 AM	Tube furnace set to 0
7/28/2010	8:03:44 AM	Helium valve closed
7/28/2010	8:03:44 AM	H2 valve closed
7/28/2010	8:03:44 AM	BCl3 valve closed
7/28/2010	8:03:44 AM	PH3 valve closed
7/28/2010	8:03:44 AM	SiCl4 pre valve closed
7/28/2010	8:03:44 AM	SiCl4 post valve closed
7/28/2010	8:03:44 AM	Bubbler valve closed
7/28/2010	8:03:44 AM	Main Vac valve opened
7/28/2010	8:03:44 AM	Bypass valve opened
7/28/2010	8:03:44 AM	Helium MFC set to  0.000000
7/28/2010	8:03:44 AM	H2 MFC set to  0.000000
7/28/2010	8:03:44 AM	BCl3 MFC set to  0.000000
7/28/2010	8:03:44 AM	PHl3 MFC set to  0.000000
7/28/2010	8:03:44 AM	SiCl4 MFC set to  0.000000
7/28/2010	8:03:44 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	8:03:44 AM	Tube furnace set to 0
7/28/2010	8:03:45 AM	Run finished at 8:03 AM
7/28/2010	8:03:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2010	8:03:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/28/2010	8:04:00 AM	Recipe started at 8:04 AM
7/28/2010	8:04:00 AM	H2 valve closed
7/28/2010	8:04:00 AM	BCl3 valve closed
7/28/2010	8:04:00 AM	PH3 valve closed
7/28/2010	8:04:00 AM	SiCl4 pre valve closed
7/28/2010	8:04:00 AM	SiCl4 post valve closed
7/28/2010	8:04:00 AM	Main Vac valve closed
7/28/2010	8:04:00 AM	Bypass valve closed
7/28/2010	8:04:00 AM	Bubbler valve closed
7/28/2010	8:04:00 AM	Helium valve opened
7/28/2010	8:04:00 AM	Helium MFC set to  500.000000
7/28/2010	8:04:00 AM	H2 MFC set to  0.000000
7/28/2010	8:04:00 AM	BCl3 MFC set to  0.000000
7/28/2010	8:04:00 AM	PHl3 MFC set to  0.000000
7/28/2010	8:04:00 AM	SiCl4 MFC set to  0.000000
7/28/2010	8:04:00 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	8:04:00 AM	Tube furnace set to 0
7/28/2010	8:05:20 AM	Helium valve closed
7/28/2010	8:05:20 AM	H2 valve closed
7/28/2010	8:05:20 AM	BCl3 valve closed
7/28/2010	8:05:20 AM	PH3 valve closed
7/28/2010	8:05:20 AM	SiCl4 pre valve closed
7/28/2010	8:05:20 AM	SiCl4 post valve closed
7/28/2010	8:05:20 AM	Main Vac valve closed
7/28/2010	8:05:20 AM	Bypass valve closed
7/28/2010	8:05:20 AM	Bubbler valve closed
7/28/2010	8:05:20 AM	Helium MFC set to  0.000000
7/28/2010	8:05:20 AM	H2 MFC set to  0.000000
7/28/2010	8:05:20 AM	BCl3 MFC set to  0.000000
7/28/2010	8:05:20 AM	PHl3 MFC set to  0.000000
7/28/2010	8:05:20 AM	SiCl4 MFC set to  0.000000
7/28/2010	8:05:20 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	8:05:20 AM	Tube furnace set to 0
7/28/2010	8:05:20 AM	Run finished at 8:05 AM
7/28/2010	8:05:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/28/2010	8:14:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2010	8:14:31 AM	Recipe started at 8:14 AM
7/28/2010	8:14:31 AM	Helium valve closed
7/28/2010	8:14:31 AM	H2 valve closed
7/28/2010	8:14:31 AM	BCl3 valve closed
7/28/2010	8:14:31 AM	PH3 valve closed
7/28/2010	8:14:31 AM	SiCl4 pre valve closed
7/28/2010	8:14:31 AM	SiCl4 post valve closed
7/28/2010	8:14:31 AM	Main Vac valve closed
7/28/2010	8:14:31 AM	Bubbler valve closed
7/28/2010	8:14:31 AM	Bypass valve opened
7/28/2010	8:14:31 AM	Helium MFC set to  0.000000
7/28/2010	8:14:31 AM	H2 MFC set to  0.000000
7/28/2010	8:14:31 AM	BCl3 MFC set to  0.000000
7/28/2010	8:14:31 AM	PHl3 MFC set to  0.000000
7/28/2010	8:14:31 AM	SiCl4 MFC set to  0.000000
7/28/2010	8:14:31 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	8:14:31 AM	Tube furnace set to 0
7/28/2010	8:15:08 AM	Helium valve closed
7/28/2010	8:15:08 AM	H2 valve closed
7/28/2010	8:15:08 AM	BCl3 valve closed
7/28/2010	8:15:08 AM	PH3 valve closed
7/28/2010	8:15:08 AM	SiCl4 pre valve closed
7/28/2010	8:15:08 AM	SiCl4 post valve closed
7/28/2010	8:15:08 AM	Bubbler valve closed
7/28/2010	8:15:08 AM	Main Vac valve opened
7/28/2010	8:15:08 AM	Bypass valve opened
7/28/2010	8:15:08 AM	Helium MFC set to  0.000000
7/28/2010	8:15:08 AM	H2 MFC set to  0.000000
7/28/2010	8:15:08 AM	BCl3 MFC set to  0.000000
7/28/2010	8:15:08 AM	PHl3 MFC set to  0.000000
7/28/2010	8:15:08 AM	SiCl4 MFC set to  0.000000
7/28/2010	8:15:08 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	8:15:08 AM	Tube furnace set to 0
7/28/2010	8:15:08 AM	Run finished at 8:15 AM
7/28/2010	8:15:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2010	8:15:24 AM	Helium MFC set to  75.000000
7/28/2010	8:15:24 AM	Helium valve opened
7/28/2010	8:46:43 AM	Helium valve closed
7/28/2010	8:47:23 AM	Helium valve opened
7/28/2010	9:08:28 AM	Helium valve closed
7/28/2010	9:10:59 AM	Recipe started at 9:10 AM
7/28/2010	9:10:59 AM	Helium valve closed
7/28/2010	9:10:59 AM	BCl3 valve closed
7/28/2010	9:10:59 AM	PH3 valve closed
7/28/2010	9:10:59 AM	SiCl4 pre valve closed
7/28/2010	9:10:59 AM	SiCl4 post valve closed
7/28/2010	9:10:59 AM	Main Vac valve closed
7/28/2010	9:10:59 AM	Bypass valve closed
7/28/2010	9:10:59 AM	Bubbler valve closed
7/28/2010	9:10:59 AM	H2 valve opened
7/28/2010	9:10:59 AM	Helium MFC set to  0.000000
7/28/2010	9:10:59 AM	H2 MFC set to  500.000000
7/28/2010	9:10:59 AM	BCl3 MFC set to  0.000000
7/28/2010	9:10:59 AM	PHl3 MFC set to  0.000000
7/28/2010	9:10:59 AM	SiCl4 MFC set to  0.000000
7/28/2010	9:10:59 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	9:11:00 AM	Tube furnace set to 100
7/28/2010	9:12:22 AM	Helium valve closed
7/28/2010	9:12:22 AM	BCl3 valve closed
7/28/2010	9:12:22 AM	PH3 valve closed
7/28/2010	9:12:22 AM	SiCl4 pre valve closed
7/28/2010	9:12:22 AM	SiCl4 post valve closed
7/28/2010	9:12:22 AM	Main Vac valve closed
7/28/2010	9:12:22 AM	Bypass valve closed
7/28/2010	9:12:22 AM	H2 valve opened
7/28/2010	9:12:22 AM	Bubbler valve opened
7/28/2010	9:12:22 AM	Helium MFC set to  0.000000
7/28/2010	9:12:22 AM	H2 MFC set to  500.000000
7/28/2010	9:12:22 AM	BCl3 MFC set to  0.000000
7/28/2010	9:12:22 AM	PHl3 MFC set to  0.000000
7/28/2010	9:12:22 AM	SiCl4 MFC set to  0.000000
7/28/2010	9:12:22 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	9:12:22 AM	Tube furnace set to 1000
7/28/2010	9:32:22 AM	Helium valve closed
7/28/2010	9:32:22 AM	BCl3 valve closed
7/28/2010	9:32:22 AM	PH3 valve closed
7/28/2010	9:32:22 AM	Main Vac valve closed
7/28/2010	9:32:22 AM	Bypass valve closed
7/28/2010	9:32:22 AM	H2 valve opened
7/28/2010	9:32:22 AM	SiCl4 pre valve opened
7/28/2010	9:32:22 AM	SiCl4 post valve opened
7/28/2010	9:32:22 AM	Bubbler valve opened
7/28/2010	9:32:22 AM	Helium MFC set to  0.000000
7/28/2010	9:32:22 AM	H2 MFC set to  500.000000
7/28/2010	9:32:22 AM	BCl3 MFC set to  0.000000
7/28/2010	9:32:22 AM	PHl3 MFC set to  0.000000
7/28/2010	9:32:22 AM	SiCl4 MFC set to  50.000000
7/28/2010	9:32:22 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	9:32:23 AM	Tube furnace set to 1000
7/28/2010	9:52:23 AM	H2 valve closed
7/28/2010	9:52:23 AM	BCl3 valve closed
7/28/2010	9:52:23 AM	PH3 valve closed
7/28/2010	9:52:23 AM	SiCl4 pre valve closed
7/28/2010	9:52:23 AM	SiCl4 post valve closed
7/28/2010	9:52:23 AM	Main Vac valve closed
7/28/2010	9:52:23 AM	Bypass valve closed
7/28/2010	9:52:23 AM	Helium valve opened
7/28/2010	9:52:23 AM	Bubbler valve opened
7/28/2010	9:52:23 AM	Helium MFC set to  500.000000
7/28/2010	9:52:23 AM	H2 MFC set to  0.000000
7/28/2010	9:52:23 AM	BCl3 MFC set to  0.000000
7/28/2010	9:52:23 AM	PHl3 MFC set to  0.000000
7/28/2010	9:52:23 AM	SiCl4 MFC set to  0.000000
7/28/2010	9:52:23 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	9:52:23 AM	Tube furnace set to 0
7/28/2010	10:23:57 AM	Helium valve closed
7/28/2010	10:23:57 AM	H2 valve closed
7/28/2010	10:23:57 AM	BCl3 valve closed
7/28/2010	10:23:57 AM	PH3 valve closed
7/28/2010	10:23:57 AM	SiCl4 pre valve closed
7/28/2010	10:23:57 AM	SiCl4 post valve closed
7/28/2010	10:23:57 AM	Main Vac valve closed
7/28/2010	10:23:57 AM	Bypass valve closed
7/28/2010	10:23:57 AM	Bubbler valve closed
7/28/2010	10:23:57 AM	Helium MFC set to  0.000000
7/28/2010	10:23:57 AM	H2 MFC set to  0.000000
7/28/2010	10:23:57 AM	BCl3 MFC set to  0.000000
7/28/2010	10:23:57 AM	PHl3 MFC set to  0.000000
7/28/2010	10:23:57 AM	SiCl4 MFC set to  0.000000
7/28/2010	10:23:57 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	10:23:57 AM	Tube furnace set to 0
7/28/2010	10:23:58 AM	Run finished at 10:23 AM
7/28/2010	10:32:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/28/2010	10:32:53 AM	Recipe started at 10:32 AM
7/28/2010	10:32:53 AM	Helium valve closed
7/28/2010	10:32:53 AM	H2 valve closed
7/28/2010	10:32:53 AM	BCl3 valve closed
7/28/2010	10:32:54 AM	PH3 valve closed
7/28/2010	10:32:54 AM	SiCl4 pre valve closed
7/28/2010	10:32:54 AM	SiCl4 post valve closed
7/28/2010	10:32:54 AM	Main Vac valve closed
7/28/2010	10:32:54 AM	Bubbler valve closed
7/28/2010	10:32:54 AM	Bypass valve opened
7/28/2010	10:32:54 AM	Helium MFC set to  0.000000
7/28/2010	10:32:54 AM	H2 MFC set to  0.000000
7/28/2010	10:32:54 AM	BCl3 MFC set to  0.000000
7/28/2010	10:32:54 AM	PHl3 MFC set to  0.000000
7/28/2010	10:32:54 AM	SiCl4 MFC set to  0.000000
7/28/2010	10:32:54 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	10:32:54 AM	Tube furnace set to 0
7/28/2010	10:33:31 AM	Helium valve closed
7/28/2010	10:33:31 AM	H2 valve closed
7/28/2010	10:33:31 AM	BCl3 valve closed
7/28/2010	10:33:31 AM	PH3 valve closed
7/28/2010	10:33:31 AM	SiCl4 pre valve closed
7/28/2010	10:33:31 AM	SiCl4 post valve closed
7/28/2010	10:33:31 AM	Bubbler valve closed
7/28/2010	10:33:31 AM	Main Vac valve opened
7/28/2010	10:33:31 AM	Bypass valve opened
7/28/2010	10:33:31 AM	Helium MFC set to  0.000000
7/28/2010	10:33:31 AM	H2 MFC set to  0.000000
7/28/2010	10:33:31 AM	BCl3 MFC set to  0.000000
7/28/2010	10:33:31 AM	PHl3 MFC set to  0.000000
7/28/2010	10:33:31 AM	SiCl4 MFC set to  0.000000
7/28/2010	10:33:31 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	10:33:31 AM	Tube furnace set to 0
7/28/2010	10:34:31 AM	H2 valve closed
7/28/2010	10:34:31 AM	BCl3 valve closed
7/28/2010	10:34:31 AM	PH3 valve closed
7/28/2010	10:34:31 AM	SiCl4 pre valve closed
7/28/2010	10:34:31 AM	SiCl4 post valve closed
7/28/2010	10:34:31 AM	Bubbler valve closed
7/28/2010	10:34:31 AM	Helium valve opened
7/28/2010	10:34:31 AM	Main Vac valve opened
7/28/2010	10:34:31 AM	Bypass valve opened
7/28/2010	10:34:31 AM	Helium MFC set to  100.000000
7/28/2010	10:34:31 AM	H2 MFC set to  0.000000
7/28/2010	10:34:31 AM	BCl3 MFC set to  0.000000
7/28/2010	10:34:31 AM	PHl3 MFC set to  0.000000
7/28/2010	10:34:31 AM	SiCl4 MFC set to  0.000000
7/28/2010	10:34:31 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	10:34:31 AM	Tube furnace set to 0
7/28/2010	10:43:31 AM	Helium valve closed
7/28/2010	10:43:31 AM	H2 valve closed
7/28/2010	10:43:31 AM	BCl3 valve closed
7/28/2010	10:43:31 AM	PH3 valve closed
7/28/2010	10:43:31 AM	SiCl4 pre valve closed
7/28/2010	10:43:31 AM	SiCl4 post valve closed
7/28/2010	10:43:31 AM	Bubbler valve closed
7/28/2010	10:43:31 AM	Main Vac valve opened
7/28/2010	10:43:31 AM	Bypass valve opened
7/28/2010	10:43:31 AM	Helium MFC set to  0.000000
7/28/2010	10:43:31 AM	H2 MFC set to  0.000000
7/28/2010	10:43:31 AM	BCl3 MFC set to  0.000000
7/28/2010	10:43:31 AM	PHl3 MFC set to  0.000000
7/28/2010	10:43:31 AM	SiCl4 MFC set to  0.000000
7/28/2010	10:43:31 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	10:43:32 AM	Tube furnace set to 0
7/28/2010	10:44:32 AM	H2 valve closed
7/28/2010	10:44:32 AM	BCl3 valve closed
7/28/2010	10:44:32 AM	PH3 valve closed
7/28/2010	10:44:32 AM	SiCl4 pre valve closed
7/28/2010	10:44:32 AM	SiCl4 post valve closed
7/28/2010	10:44:32 AM	Bubbler valve closed
7/28/2010	10:44:32 AM	Helium valve opened
7/28/2010	10:44:32 AM	Main Vac valve opened
7/28/2010	10:44:32 AM	Bypass valve opened
7/28/2010	10:44:32 AM	Helium MFC set to  100.000000
7/28/2010	10:44:32 AM	H2 MFC set to  0.000000
7/28/2010	10:44:32 AM	BCl3 MFC set to  0.000000
7/28/2010	10:44:32 AM	PHl3 MFC set to  0.000000
7/28/2010	10:44:32 AM	SiCl4 MFC set to  0.000000
7/28/2010	10:44:32 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	10:44:32 AM	Tube furnace set to 0
7/28/2010	10:53:32 AM	Helium valve closed
7/28/2010	10:53:32 AM	H2 valve closed
7/28/2010	10:53:32 AM	BCl3 valve closed
7/28/2010	10:53:32 AM	PH3 valve closed
7/28/2010	10:53:32 AM	SiCl4 pre valve closed
7/28/2010	10:53:32 AM	SiCl4 post valve closed
7/28/2010	10:53:32 AM	Bubbler valve closed
7/28/2010	10:53:32 AM	Main Vac valve opened
7/28/2010	10:53:32 AM	Bypass valve opened
7/28/2010	10:53:32 AM	Helium MFC set to  0.000000
7/28/2010	10:53:32 AM	H2 MFC set to  0.000000
7/28/2010	10:53:32 AM	BCl3 MFC set to  0.000000
7/28/2010	10:53:32 AM	PHl3 MFC set to  0.000000
7/28/2010	10:53:32 AM	SiCl4 MFC set to  0.000000
7/28/2010	10:53:32 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	10:53:32 AM	Tube furnace set to 0
7/28/2010	10:54:00 AM	H2 valve closed
7/28/2010	10:54:00 AM	BCl3 valve closed
7/28/2010	10:54:00 AM	PH3 valve closed
7/28/2010	10:54:00 AM	SiCl4 pre valve closed
7/28/2010	10:54:00 AM	SiCl4 post valve closed
7/28/2010	10:54:00 AM	Bubbler valve closed
7/28/2010	10:54:00 AM	Helium valve opened
7/28/2010	10:54:00 AM	Main Vac valve opened
7/28/2010	10:54:00 AM	Bypass valve opened
7/28/2010	10:54:00 AM	Helium MFC set to  100.000000
7/28/2010	10:54:00 AM	H2 MFC set to  0.000000
7/28/2010	10:54:00 AM	BCl3 MFC set to  0.000000
7/28/2010	10:54:00 AM	PHl3 MFC set to  0.000000
7/28/2010	10:54:00 AM	SiCl4 MFC set to  0.000000
7/28/2010	10:54:00 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	10:54:01 AM	Tube furnace set to 0
7/28/2010	11:03:01 AM	Helium valve closed
7/28/2010	11:03:01 AM	H2 valve closed
7/28/2010	11:03:01 AM	BCl3 valve closed
7/28/2010	11:03:01 AM	PH3 valve closed
7/28/2010	11:03:01 AM	SiCl4 pre valve closed
7/28/2010	11:03:01 AM	SiCl4 post valve closed
7/28/2010	11:03:01 AM	Bubbler valve closed
7/28/2010	11:03:01 AM	Main Vac valve opened
7/28/2010	11:03:01 AM	Bypass valve opened
7/28/2010	11:03:01 AM	Helium MFC set to  0.000000
7/28/2010	11:03:01 AM	H2 MFC set to  0.000000
7/28/2010	11:03:01 AM	BCl3 MFC set to  0.000000
7/28/2010	11:03:01 AM	PHl3 MFC set to  0.000000
7/28/2010	11:03:01 AM	SiCl4 MFC set to  0.000000
7/28/2010	11:03:01 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	11:03:01 AM	Tube furnace set to 0
7/28/2010	11:03:02 AM	Run finished at 11:03 AM
7/28/2010	11:03:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/28/2010	11:08:10 AM	Helium MFC set to  75.000000
7/28/2010	11:08:10 AM	Helium valve opened
7/28/2010	11:25:05 AM	Helium valve closed
7/28/2010	11:26:13 AM	Recipe started at 11:26 AM
7/28/2010	11:26:13 AM	Helium valve closed
7/28/2010	11:26:13 AM	BCl3 valve closed
7/28/2010	11:26:13 AM	PH3 valve closed
7/28/2010	11:26:13 AM	SiCl4 pre valve closed
7/28/2010	11:26:13 AM	SiCl4 post valve closed
7/28/2010	11:26:13 AM	Main Vac valve closed
7/28/2010	11:26:13 AM	Bypass valve closed
7/28/2010	11:26:13 AM	Bubbler valve closed
7/28/2010	11:26:13 AM	H2 valve opened
7/28/2010	11:26:13 AM	Helium MFC set to  0.000000
7/28/2010	11:26:13 AM	H2 MFC set to  500.000000
7/28/2010	11:26:13 AM	BCl3 MFC set to  0.000000
7/28/2010	11:26:13 AM	PHl3 MFC set to  0.000000
7/28/2010	11:26:13 AM	SiCl4 MFC set to  0.000000
7/28/2010	11:26:13 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	11:26:13 AM	Tube furnace set to 100
7/28/2010	11:27:36 AM	Helium valve closed
7/28/2010	11:27:36 AM	BCl3 valve closed
7/28/2010	11:27:36 AM	PH3 valve closed
7/28/2010	11:27:36 AM	SiCl4 pre valve closed
7/28/2010	11:27:36 AM	SiCl4 post valve closed
7/28/2010	11:27:36 AM	Main Vac valve closed
7/28/2010	11:27:36 AM	Bypass valve closed
7/28/2010	11:27:36 AM	H2 valve opened
7/28/2010	11:27:36 AM	Bubbler valve opened
7/28/2010	11:27:36 AM	Helium MFC set to  0.000000
7/28/2010	11:27:36 AM	H2 MFC set to  500.000000
7/28/2010	11:27:36 AM	BCl3 MFC set to  0.000000
7/28/2010	11:27:36 AM	PHl3 MFC set to  0.000000
7/28/2010	11:27:36 AM	SiCl4 MFC set to  0.000000
7/28/2010	11:27:36 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	11:27:36 AM	Tube furnace set to 1000
7/28/2010	11:47:36 AM	Helium valve closed
7/28/2010	11:47:36 AM	BCl3 valve closed
7/28/2010	11:47:36 AM	PH3 valve closed
7/28/2010	11:47:36 AM	Main Vac valve closed
7/28/2010	11:47:36 AM	Bypass valve closed
7/28/2010	11:47:36 AM	H2 valve opened
7/28/2010	11:47:36 AM	SiCl4 pre valve opened
7/28/2010	11:47:36 AM	SiCl4 post valve opened
7/28/2010	11:47:36 AM	Bubbler valve opened
7/28/2010	11:47:36 AM	Helium MFC set to  0.000000
7/28/2010	11:47:36 AM	H2 MFC set to  500.000000
7/28/2010	11:47:36 AM	BCl3 MFC set to  0.000000
7/28/2010	11:47:36 AM	PHl3 MFC set to  0.000000
7/28/2010	11:47:36 AM	SiCl4 MFC set to  50.000000
7/28/2010	11:47:36 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	11:47:36 AM	Tube furnace set to 1000
7/28/2010	11:59:36 AM	H2 valve closed
7/28/2010	11:59:36 AM	BCl3 valve closed
7/28/2010	11:59:36 AM	PH3 valve closed
7/28/2010	11:59:36 AM	SiCl4 pre valve closed
7/28/2010	11:59:36 AM	SiCl4 post valve closed
7/28/2010	11:59:36 AM	Main Vac valve closed
7/28/2010	11:59:36 AM	Bypass valve closed
7/28/2010	11:59:36 AM	Helium valve opened
7/28/2010	11:59:36 AM	Bubbler valve opened
7/28/2010	11:59:36 AM	Helium MFC set to  500.000000
7/28/2010	11:59:36 AM	H2 MFC set to  0.000000
7/28/2010	11:59:36 AM	BCl3 MFC set to  0.000000
7/28/2010	11:59:36 AM	PHl3 MFC set to  0.000000
7/28/2010	11:59:36 AM	SiCl4 MFC set to  0.000000
7/28/2010	11:59:36 AM	Bypass solenoid MFC set to  0.000000
7/28/2010	11:59:36 AM	Tube furnace set to 0
7/28/2010	12:32:56 PM	Helium valve closed
7/28/2010	12:32:56 PM	H2 valve closed
7/28/2010	12:32:56 PM	BCl3 valve closed
7/28/2010	12:32:56 PM	PH3 valve closed
7/28/2010	12:32:56 PM	SiCl4 pre valve closed
7/28/2010	12:32:56 PM	SiCl4 post valve closed
7/28/2010	12:32:56 PM	Main Vac valve closed
7/28/2010	12:32:56 PM	Bypass valve closed
7/28/2010	12:32:56 PM	Bubbler valve closed
7/28/2010	12:32:56 PM	Helium MFC set to  0.000000
7/28/2010	12:32:56 PM	H2 MFC set to  0.000000
7/28/2010	12:32:56 PM	BCl3 MFC set to  0.000000
7/28/2010	12:32:56 PM	PHl3 MFC set to  0.000000
7/28/2010	12:32:56 PM	SiCl4 MFC set to  0.000000
7/28/2010	12:32:56 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	12:32:57 PM	Tube furnace set to 0
7/28/2010	12:32:57 PM	Run finished at 12:32 PM
7/28/2010	1:11:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2010	1:11:26 PM	Recipe started at 1:11 PM
7/28/2010	1:11:26 PM	Helium valve closed
7/28/2010	1:11:26 PM	H2 valve closed
7/28/2010	1:11:26 PM	BCl3 valve closed
7/28/2010	1:11:26 PM	PH3 valve closed
7/28/2010	1:11:26 PM	SiCl4 pre valve closed
7/28/2010	1:11:26 PM	SiCl4 post valve closed
7/28/2010	1:11:26 PM	Main Vac valve closed
7/28/2010	1:11:26 PM	Bubbler valve closed
7/28/2010	1:11:26 PM	Bypass valve opened
7/28/2010	1:11:26 PM	Helium MFC set to  0.000000
7/28/2010	1:11:26 PM	H2 MFC set to  0.000000
7/28/2010	1:11:26 PM	BCl3 MFC set to  0.000000
7/28/2010	1:11:26 PM	PHl3 MFC set to  0.000000
7/28/2010	1:11:26 PM	SiCl4 MFC set to  0.000000
7/28/2010	1:11:26 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	1:11:27 PM	Tube furnace set to 0
7/28/2010	1:12:04 PM	Helium valve closed
7/28/2010	1:12:04 PM	H2 valve closed
7/28/2010	1:12:04 PM	BCl3 valve closed
7/28/2010	1:12:04 PM	PH3 valve closed
7/28/2010	1:12:04 PM	SiCl4 pre valve closed
7/28/2010	1:12:04 PM	SiCl4 post valve closed
7/28/2010	1:12:04 PM	Bubbler valve closed
7/28/2010	1:12:04 PM	Main Vac valve opened
7/28/2010	1:12:04 PM	Bypass valve opened
7/28/2010	1:12:04 PM	Helium MFC set to  0.000000
7/28/2010	1:12:04 PM	H2 MFC set to  0.000000
7/28/2010	1:12:04 PM	BCl3 MFC set to  0.000000
7/28/2010	1:12:04 PM	PHl3 MFC set to  0.000000
7/28/2010	1:12:04 PM	SiCl4 MFC set to  0.000000
7/28/2010	1:12:04 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	1:12:04 PM	Tube furnace set to 0
7/28/2010	1:12:04 PM	Run finished at 1:12 PM
7/28/2010	1:12:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2010	1:12:19 PM	Helium MFC set to  75.000000
7/28/2010	1:12:20 PM	Helium valve opened
7/28/2010	1:22:35 PM	Helium valve closed
7/28/2010	1:23:06 PM	Helium valve opened
7/28/2010	1:44:16 PM	Helium valve closed
7/28/2010	1:45:47 PM	Recipe started at 1:45 PM
7/28/2010	1:45:47 PM	Helium valve closed
7/28/2010	1:45:47 PM	BCl3 valve closed
7/28/2010	1:45:47 PM	PH3 valve closed
7/28/2010	1:45:47 PM	SiCl4 pre valve closed
7/28/2010	1:45:47 PM	SiCl4 post valve closed
7/28/2010	1:45:47 PM	Main Vac valve closed
7/28/2010	1:45:47 PM	Bypass valve closed
7/28/2010	1:45:47 PM	Bubbler valve closed
7/28/2010	1:45:47 PM	H2 valve opened
7/28/2010	1:45:47 PM	Helium MFC set to  0.000000
7/28/2010	1:45:47 PM	H2 MFC set to  500.000000
7/28/2010	1:45:47 PM	BCl3 MFC set to  0.000000
7/28/2010	1:45:47 PM	PHl3 MFC set to  0.000000
7/28/2010	1:45:47 PM	SiCl4 MFC set to  0.000000
7/28/2010	1:45:47 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	1:45:47 PM	Tube furnace set to 100
7/28/2010	1:47:10 PM	Helium valve closed
7/28/2010	1:47:10 PM	BCl3 valve closed
7/28/2010	1:47:10 PM	PH3 valve closed
7/28/2010	1:47:10 PM	SiCl4 pre valve closed
7/28/2010	1:47:10 PM	SiCl4 post valve closed
7/28/2010	1:47:10 PM	Main Vac valve closed
7/28/2010	1:47:10 PM	Bypass valve closed
7/28/2010	1:47:10 PM	H2 valve opened
7/28/2010	1:47:10 PM	Bubbler valve opened
7/28/2010	1:47:10 PM	Helium MFC set to  0.000000
7/28/2010	1:47:10 PM	H2 MFC set to  500.000000
7/28/2010	1:47:10 PM	BCl3 MFC set to  0.000000
7/28/2010	1:47:10 PM	PHl3 MFC set to  0.000000
7/28/2010	1:47:10 PM	SiCl4 MFC set to  0.000000
7/28/2010	1:47:10 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	1:47:10 PM	Tube furnace set to 1000
7/28/2010	2:07:10 PM	Helium valve closed
7/28/2010	2:07:10 PM	BCl3 valve closed
7/28/2010	2:07:10 PM	PH3 valve closed
7/28/2010	2:07:10 PM	Main Vac valve closed
7/28/2010	2:07:10 PM	Bypass valve closed
7/28/2010	2:07:10 PM	H2 valve opened
7/28/2010	2:07:10 PM	SiCl4 pre valve opened
7/28/2010	2:07:10 PM	SiCl4 post valve opened
7/28/2010	2:07:10 PM	Bubbler valve opened
7/28/2010	2:07:10 PM	Helium MFC set to  0.000000
7/28/2010	2:07:10 PM	H2 MFC set to  500.000000
7/28/2010	2:07:10 PM	BCl3 MFC set to  0.000000
7/28/2010	2:07:10 PM	PHl3 MFC set to  0.000000
7/28/2010	2:07:10 PM	SiCl4 MFC set to  50.000000
7/28/2010	2:07:10 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	2:07:10 PM	Tube furnace set to 1000
7/28/2010	2:27:10 PM	H2 valve closed
7/28/2010	2:27:10 PM	BCl3 valve closed
7/28/2010	2:27:10 PM	PH3 valve closed
7/28/2010	2:27:10 PM	SiCl4 pre valve closed
7/28/2010	2:27:10 PM	SiCl4 post valve closed
7/28/2010	2:27:10 PM	Main Vac valve closed
7/28/2010	2:27:10 PM	Bypass valve closed
7/28/2010	2:27:10 PM	Helium valve opened
7/28/2010	2:27:10 PM	Bubbler valve opened
7/28/2010	2:27:10 PM	Helium MFC set to  500.000000
7/28/2010	2:27:10 PM	H2 MFC set to  0.000000
7/28/2010	2:27:10 PM	BCl3 MFC set to  0.000000
7/28/2010	2:27:10 PM	PHl3 MFC set to  0.000000
7/28/2010	2:27:10 PM	SiCl4 MFC set to  0.000000
7/28/2010	2:27:10 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	2:27:10 PM	Tube furnace set to 0
7/28/2010	2:57:36 PM	Helium valve closed
7/28/2010	2:57:36 PM	H2 valve closed
7/28/2010	2:57:36 PM	BCl3 valve closed
7/28/2010	2:57:36 PM	PH3 valve closed
7/28/2010	2:57:36 PM	SiCl4 pre valve closed
7/28/2010	2:57:36 PM	SiCl4 post valve closed
7/28/2010	2:57:36 PM	Main Vac valve closed
7/28/2010	2:57:36 PM	Bypass valve closed
7/28/2010	2:57:36 PM	Bubbler valve closed
7/28/2010	2:57:36 PM	Helium MFC set to  0.000000
7/28/2010	2:57:36 PM	H2 MFC set to  0.000000
7/28/2010	2:57:36 PM	BCl3 MFC set to  0.000000
7/28/2010	2:57:36 PM	PHl3 MFC set to  0.000000
7/28/2010	2:57:36 PM	SiCl4 MFC set to  0.000000
7/28/2010	2:57:36 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	2:57:36 PM	Tube furnace set to 0
7/28/2010	2:57:36 PM	Run finished at 2:57 PM
7/28/2010	3:03:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/28/2010	3:03:37 PM	Recipe started at 3:03 PM
7/28/2010	3:03:37 PM	Helium valve closed
7/28/2010	3:03:37 PM	H2 valve closed
7/28/2010	3:03:37 PM	BCl3 valve closed
7/28/2010	3:03:37 PM	PH3 valve closed
7/28/2010	3:03:37 PM	SiCl4 pre valve closed
7/28/2010	3:03:37 PM	SiCl4 post valve closed
7/28/2010	3:03:37 PM	Main Vac valve closed
7/28/2010	3:03:37 PM	Bubbler valve closed
7/28/2010	3:03:37 PM	Bypass valve opened
7/28/2010	3:03:37 PM	Helium MFC set to  0.000000
7/28/2010	3:03:37 PM	H2 MFC set to  0.000000
7/28/2010	3:03:37 PM	BCl3 MFC set to  0.000000
7/28/2010	3:03:37 PM	PHl3 MFC set to  0.000000
7/28/2010	3:03:37 PM	SiCl4 MFC set to  0.000000
7/28/2010	3:03:37 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	3:03:37 PM	Tube furnace set to 0
7/28/2010	3:04:14 PM	Helium valve closed
7/28/2010	3:04:14 PM	H2 valve closed
7/28/2010	3:04:14 PM	BCl3 valve closed
7/28/2010	3:04:14 PM	PH3 valve closed
7/28/2010	3:04:14 PM	SiCl4 pre valve closed
7/28/2010	3:04:14 PM	SiCl4 post valve closed
7/28/2010	3:04:14 PM	Bubbler valve closed
7/28/2010	3:04:14 PM	Main Vac valve opened
7/28/2010	3:04:14 PM	Bypass valve opened
7/28/2010	3:04:14 PM	Helium MFC set to  0.000000
7/28/2010	3:04:14 PM	H2 MFC set to  0.000000
7/28/2010	3:04:14 PM	BCl3 MFC set to  0.000000
7/28/2010	3:04:14 PM	PHl3 MFC set to  0.000000
7/28/2010	3:04:14 PM	SiCl4 MFC set to  0.000000
7/28/2010	3:04:14 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	3:04:14 PM	Tube furnace set to 0
7/28/2010	3:05:14 PM	H2 valve closed
7/28/2010	3:05:14 PM	BCl3 valve closed
7/28/2010	3:05:14 PM	PH3 valve closed
7/28/2010	3:05:14 PM	SiCl4 pre valve closed
7/28/2010	3:05:14 PM	SiCl4 post valve closed
7/28/2010	3:05:14 PM	Bubbler valve closed
7/28/2010	3:05:14 PM	Helium valve opened
7/28/2010	3:05:14 PM	Main Vac valve opened
7/28/2010	3:05:14 PM	Bypass valve opened
7/28/2010	3:05:14 PM	Helium MFC set to  100.000000
7/28/2010	3:05:14 PM	H2 MFC set to  0.000000
7/28/2010	3:05:14 PM	BCl3 MFC set to  0.000000
7/28/2010	3:05:14 PM	PHl3 MFC set to  0.000000
7/28/2010	3:05:14 PM	SiCl4 MFC set to  0.000000
7/28/2010	3:05:14 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	3:05:14 PM	Tube furnace set to 0
7/28/2010	3:14:14 PM	Helium valve closed
7/28/2010	3:14:14 PM	H2 valve closed
7/28/2010	3:14:14 PM	BCl3 valve closed
7/28/2010	3:14:14 PM	PH3 valve closed
7/28/2010	3:14:14 PM	SiCl4 pre valve closed
7/28/2010	3:14:14 PM	SiCl4 post valve closed
7/28/2010	3:14:14 PM	Bubbler valve closed
7/28/2010	3:14:14 PM	Main Vac valve opened
7/28/2010	3:14:14 PM	Bypass valve opened
7/28/2010	3:14:14 PM	Helium MFC set to  0.000000
7/28/2010	3:14:14 PM	H2 MFC set to  0.000000
7/28/2010	3:14:14 PM	BCl3 MFC set to  0.000000
7/28/2010	3:14:14 PM	PHl3 MFC set to  0.000000
7/28/2010	3:14:14 PM	SiCl4 MFC set to  0.000000
7/28/2010	3:14:14 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	3:14:15 PM	Tube furnace set to 0
7/28/2010	3:15:15 PM	H2 valve closed
7/28/2010	3:15:15 PM	BCl3 valve closed
7/28/2010	3:15:15 PM	PH3 valve closed
7/28/2010	3:15:15 PM	SiCl4 pre valve closed
7/28/2010	3:15:15 PM	SiCl4 post valve closed
7/28/2010	3:15:15 PM	Bubbler valve closed
7/28/2010	3:15:15 PM	Helium valve opened
7/28/2010	3:15:15 PM	Main Vac valve opened
7/28/2010	3:15:15 PM	Bypass valve opened
7/28/2010	3:15:15 PM	Helium MFC set to  100.000000
7/28/2010	3:15:15 PM	H2 MFC set to  0.000000
7/28/2010	3:15:15 PM	BCl3 MFC set to  0.000000
7/28/2010	3:15:15 PM	PHl3 MFC set to  0.000000
7/28/2010	3:15:15 PM	SiCl4 MFC set to  0.000000
7/28/2010	3:15:15 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	3:15:15 PM	Tube furnace set to 0
7/28/2010	3:24:15 PM	Helium valve closed
7/28/2010	3:24:15 PM	H2 valve closed
7/28/2010	3:24:15 PM	BCl3 valve closed
7/28/2010	3:24:15 PM	PH3 valve closed
7/28/2010	3:24:15 PM	SiCl4 pre valve closed
7/28/2010	3:24:15 PM	SiCl4 post valve closed
7/28/2010	3:24:15 PM	Bubbler valve closed
7/28/2010	3:24:15 PM	Main Vac valve opened
7/28/2010	3:24:15 PM	Bypass valve opened
7/28/2010	3:24:15 PM	Helium MFC set to  0.000000
7/28/2010	3:24:15 PM	H2 MFC set to  0.000000
7/28/2010	3:24:15 PM	BCl3 MFC set to  0.000000
7/28/2010	3:24:15 PM	PHl3 MFC set to  0.000000
7/28/2010	3:24:15 PM	SiCl4 MFC set to  0.000000
7/28/2010	3:24:15 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	3:24:15 PM	Tube furnace set to 0
7/28/2010	3:24:26 PM	H2 valve closed
7/28/2010	3:24:26 PM	BCl3 valve closed
7/28/2010	3:24:26 PM	PH3 valve closed
7/28/2010	3:24:26 PM	SiCl4 pre valve closed
7/28/2010	3:24:26 PM	SiCl4 post valve closed
7/28/2010	3:24:26 PM	Bubbler valve closed
7/28/2010	3:24:26 PM	Helium valve opened
7/28/2010	3:24:26 PM	Main Vac valve opened
7/28/2010	3:24:26 PM	Bypass valve opened
7/28/2010	3:24:26 PM	Helium MFC set to  100.000000
7/28/2010	3:24:26 PM	H2 MFC set to  0.000000
7/28/2010	3:24:26 PM	BCl3 MFC set to  0.000000
7/28/2010	3:24:26 PM	PHl3 MFC set to  0.000000
7/28/2010	3:24:26 PM	SiCl4 MFC set to  0.000000
7/28/2010	3:24:26 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	3:24:26 PM	Tube furnace set to 0
7/28/2010	3:24:28 PM	Helium valve closed
7/28/2010	3:24:28 PM	H2 valve closed
7/28/2010	3:24:28 PM	BCl3 valve closed
7/28/2010	3:24:28 PM	PH3 valve closed
7/28/2010	3:24:28 PM	SiCl4 pre valve closed
7/28/2010	3:24:28 PM	SiCl4 post valve closed
7/28/2010	3:24:28 PM	Bubbler valve closed
7/28/2010	3:24:28 PM	Main Vac valve opened
7/28/2010	3:24:28 PM	Bypass valve opened
7/28/2010	3:24:28 PM	Helium MFC set to  0.000000
7/28/2010	3:24:29 PM	H2 MFC set to  0.000000
7/28/2010	3:24:29 PM	BCl3 MFC set to  0.000000
7/28/2010	3:24:29 PM	PHl3 MFC set to  0.000000
7/28/2010	3:24:29 PM	SiCl4 MFC set to  0.000000
7/28/2010	3:24:29 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	3:24:29 PM	Tube furnace set to 0
7/28/2010	3:24:30 PM	Run finished at 3:24 PM
7/28/2010	3:24:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/28/2010	3:43:21 PM	Helium MFC set to  100.000000
7/28/2010	3:43:22 PM	Helium valve opened
7/28/2010	3:59:56 PM	Helium valve closed
7/28/2010	4:01:28 PM	Recipe started at 4:01 PM
7/28/2010	4:01:28 PM	Helium valve closed
7/28/2010	4:01:28 PM	BCl3 valve closed
7/28/2010	4:01:28 PM	PH3 valve closed
7/28/2010	4:01:28 PM	SiCl4 pre valve closed
7/28/2010	4:01:28 PM	SiCl4 post valve closed
7/28/2010	4:01:28 PM	Main Vac valve closed
7/28/2010	4:01:28 PM	Bypass valve closed
7/28/2010	4:01:28 PM	Bubbler valve closed
7/28/2010	4:01:28 PM	H2 valve opened
7/28/2010	4:01:28 PM	Helium MFC set to  0.000000
7/28/2010	4:01:28 PM	H2 MFC set to  500.000000
7/28/2010	4:01:28 PM	BCl3 MFC set to  0.000000
7/28/2010	4:01:28 PM	PHl3 MFC set to  0.000000
7/28/2010	4:01:28 PM	SiCl4 MFC set to  0.000000
7/28/2010	4:01:28 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	4:01:28 PM	Tube furnace set to 100
7/28/2010	4:02:50 PM	Helium valve closed
7/28/2010	4:02:50 PM	BCl3 valve closed
7/28/2010	4:02:50 PM	PH3 valve closed
7/28/2010	4:02:50 PM	SiCl4 pre valve closed
7/28/2010	4:02:50 PM	SiCl4 post valve closed
7/28/2010	4:02:50 PM	Main Vac valve closed
7/28/2010	4:02:50 PM	Bypass valve closed
7/28/2010	4:02:50 PM	H2 valve opened
7/28/2010	4:02:50 PM	Bubbler valve opened
7/28/2010	4:02:50 PM	Helium MFC set to  0.000000
7/28/2010	4:02:50 PM	H2 MFC set to  500.000000
7/28/2010	4:02:50 PM	BCl3 MFC set to  0.000000
7/28/2010	4:02:50 PM	PHl3 MFC set to  0.000000
7/28/2010	4:02:50 PM	SiCl4 MFC set to  0.000000
7/28/2010	4:02:50 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	4:02:50 PM	Tube furnace set to 1000
7/28/2010	4:22:50 PM	Helium valve closed
7/28/2010	4:22:50 PM	BCl3 valve closed
7/28/2010	4:22:50 PM	PH3 valve closed
7/28/2010	4:22:50 PM	Main Vac valve closed
7/28/2010	4:22:50 PM	Bypass valve closed
7/28/2010	4:22:50 PM	H2 valve opened
7/28/2010	4:22:50 PM	SiCl4 pre valve opened
7/28/2010	4:22:50 PM	SiCl4 post valve opened
7/28/2010	4:22:50 PM	Bubbler valve opened
7/28/2010	4:22:50 PM	Helium MFC set to  0.000000
7/28/2010	4:22:50 PM	H2 MFC set to  500.000000
7/28/2010	4:22:50 PM	BCl3 MFC set to  0.000000
7/28/2010	4:22:50 PM	PHl3 MFC set to  0.000000
7/28/2010	4:22:50 PM	SiCl4 MFC set to  50.000000
7/28/2010	4:22:50 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	4:22:51 PM	Tube furnace set to 1000
7/28/2010	4:38:51 PM	H2 valve closed
7/28/2010	4:38:51 PM	BCl3 valve closed
7/28/2010	4:38:51 PM	PH3 valve closed
7/28/2010	4:38:51 PM	SiCl4 pre valve closed
7/28/2010	4:38:51 PM	SiCl4 post valve closed
7/28/2010	4:38:51 PM	Main Vac valve closed
7/28/2010	4:38:51 PM	Bypass valve closed
7/28/2010	4:38:51 PM	Helium valve opened
7/28/2010	4:38:51 PM	Bubbler valve opened
7/28/2010	4:38:51 PM	Helium MFC set to  500.000000
7/28/2010	4:38:51 PM	H2 MFC set to  0.000000
7/28/2010	4:38:51 PM	BCl3 MFC set to  0.000000
7/28/2010	4:38:51 PM	PHl3 MFC set to  0.000000
7/28/2010	4:38:51 PM	SiCl4 MFC set to  0.000000
7/28/2010	4:38:51 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	4:38:51 PM	Tube furnace set to 0
7/28/2010	5:12:11 PM	Helium valve closed
7/28/2010	5:12:11 PM	H2 valve closed
7/28/2010	5:12:11 PM	BCl3 valve closed
7/28/2010	5:12:11 PM	PH3 valve closed
7/28/2010	5:12:11 PM	SiCl4 pre valve closed
7/28/2010	5:12:11 PM	SiCl4 post valve closed
7/28/2010	5:12:11 PM	Main Vac valve closed
7/28/2010	5:12:11 PM	Bypass valve closed
7/28/2010	5:12:11 PM	Bubbler valve closed
7/28/2010	5:12:11 PM	Helium MFC set to  0.000000
7/28/2010	5:12:11 PM	H2 MFC set to  0.000000
7/28/2010	5:12:11 PM	BCl3 MFC set to  0.000000
7/28/2010	5:12:11 PM	PHl3 MFC set to  0.000000
7/28/2010	5:12:11 PM	SiCl4 MFC set to  0.000000
7/28/2010	5:12:11 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	5:12:11 PM	Tube furnace set to 0
7/28/2010	5:12:11 PM	Run finished at 5:12 PM
7/28/2010	5:33:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/28/2010	5:33:05 PM	Recipe started at 5:33 PM
7/28/2010	5:33:05 PM	Helium valve closed
7/28/2010	5:33:05 PM	H2 valve closed
7/28/2010	5:33:05 PM	BCl3 valve closed
7/28/2010	5:33:05 PM	PH3 valve closed
7/28/2010	5:33:05 PM	SiCl4 pre valve closed
7/28/2010	5:33:05 PM	SiCl4 post valve closed
7/28/2010	5:33:05 PM	Main Vac valve closed
7/28/2010	5:33:05 PM	Bubbler valve closed
7/28/2010	5:33:05 PM	Bypass valve opened
7/28/2010	5:33:05 PM	Helium MFC set to  0.000000
7/28/2010	5:33:05 PM	H2 MFC set to  0.000000
7/28/2010	5:33:05 PM	BCl3 MFC set to  0.000000
7/28/2010	5:33:05 PM	PHl3 MFC set to  0.000000
7/28/2010	5:33:05 PM	SiCl4 MFC set to  0.000000
7/28/2010	5:33:05 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	5:33:05 PM	Tube furnace set to 0
7/28/2010	5:33:43 PM	Helium valve closed
7/28/2010	5:33:43 PM	H2 valve closed
7/28/2010	5:33:43 PM	BCl3 valve closed
7/28/2010	5:33:43 PM	PH3 valve closed
7/28/2010	5:33:43 PM	SiCl4 pre valve closed
7/28/2010	5:33:43 PM	SiCl4 post valve closed
7/28/2010	5:33:43 PM	Bubbler valve closed
7/28/2010	5:33:43 PM	Main Vac valve opened
7/28/2010	5:33:43 PM	Bypass valve opened
7/28/2010	5:33:43 PM	Helium MFC set to  0.000000
7/28/2010	5:33:43 PM	H2 MFC set to  0.000000
7/28/2010	5:33:43 PM	BCl3 MFC set to  0.000000
7/28/2010	5:33:43 PM	PHl3 MFC set to  0.000000
7/28/2010	5:33:43 PM	SiCl4 MFC set to  0.000000
7/28/2010	5:33:43 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	5:33:43 PM	Tube furnace set to 0
7/28/2010	5:34:43 PM	H2 valve closed
7/28/2010	5:34:43 PM	BCl3 valve closed
7/28/2010	5:34:43 PM	PH3 valve closed
7/28/2010	5:34:43 PM	SiCl4 pre valve closed
7/28/2010	5:34:43 PM	SiCl4 post valve closed
7/28/2010	5:34:43 PM	Bubbler valve closed
7/28/2010	5:34:43 PM	Helium valve opened
7/28/2010	5:34:43 PM	Main Vac valve opened
7/28/2010	5:34:43 PM	Bypass valve opened
7/28/2010	5:34:43 PM	Helium MFC set to  100.000000
7/28/2010	5:34:43 PM	H2 MFC set to  0.000000
7/28/2010	5:34:43 PM	BCl3 MFC set to  0.000000
7/28/2010	5:34:43 PM	PHl3 MFC set to  0.000000
7/28/2010	5:34:43 PM	SiCl4 MFC set to  0.000000
7/28/2010	5:34:43 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	5:34:43 PM	Tube furnace set to 0
7/28/2010	5:43:43 PM	Helium valve closed
7/28/2010	5:43:43 PM	H2 valve closed
7/28/2010	5:43:43 PM	BCl3 valve closed
7/28/2010	5:43:43 PM	PH3 valve closed
7/28/2010	5:43:43 PM	SiCl4 pre valve closed
7/28/2010	5:43:43 PM	SiCl4 post valve closed
7/28/2010	5:43:43 PM	Bubbler valve closed
7/28/2010	5:43:43 PM	Main Vac valve opened
7/28/2010	5:43:43 PM	Bypass valve opened
7/28/2010	5:43:43 PM	Helium MFC set to  0.000000
7/28/2010	5:43:43 PM	H2 MFC set to  0.000000
7/28/2010	5:43:43 PM	BCl3 MFC set to  0.000000
7/28/2010	5:43:43 PM	PHl3 MFC set to  0.000000
7/28/2010	5:43:43 PM	SiCl4 MFC set to  0.000000
7/28/2010	5:43:43 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	5:43:43 PM	Tube furnace set to 0
7/28/2010	5:44:43 PM	H2 valve closed
7/28/2010	5:44:43 PM	BCl3 valve closed
7/28/2010	5:44:43 PM	PH3 valve closed
7/28/2010	5:44:43 PM	SiCl4 pre valve closed
7/28/2010	5:44:43 PM	SiCl4 post valve closed
7/28/2010	5:44:43 PM	Bubbler valve closed
7/28/2010	5:44:43 PM	Helium valve opened
7/28/2010	5:44:43 PM	Main Vac valve opened
7/28/2010	5:44:43 PM	Bypass valve opened
7/28/2010	5:44:43 PM	Helium MFC set to  100.000000
7/28/2010	5:44:43 PM	H2 MFC set to  0.000000
7/28/2010	5:44:43 PM	BCl3 MFC set to  0.000000
7/28/2010	5:44:43 PM	PHl3 MFC set to  0.000000
7/28/2010	5:44:43 PM	SiCl4 MFC set to  0.000000
7/28/2010	5:44:43 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	5:44:43 PM	Tube furnace set to 0
7/28/2010	5:53:43 PM	Helium valve closed
7/28/2010	5:53:43 PM	H2 valve closed
7/28/2010	5:53:43 PM	BCl3 valve closed
7/28/2010	5:53:43 PM	PH3 valve closed
7/28/2010	5:53:43 PM	SiCl4 pre valve closed
7/28/2010	5:53:43 PM	SiCl4 post valve closed
7/28/2010	5:53:43 PM	Bubbler valve closed
7/28/2010	5:53:43 PM	Main Vac valve opened
7/28/2010	5:53:43 PM	Bypass valve opened
7/28/2010	5:53:43 PM	Helium MFC set to  0.000000
7/28/2010	5:53:43 PM	H2 MFC set to  0.000000
7/28/2010	5:53:43 PM	BCl3 MFC set to  0.000000
7/28/2010	5:53:43 PM	PHl3 MFC set to  0.000000
7/28/2010	5:53:43 PM	SiCl4 MFC set to  0.000000
7/28/2010	5:53:43 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	5:53:44 PM	Tube furnace set to 0
7/28/2010	5:54:21 PM	H2 valve closed
7/28/2010	5:54:21 PM	BCl3 valve closed
7/28/2010	5:54:21 PM	PH3 valve closed
7/28/2010	5:54:21 PM	SiCl4 pre valve closed
7/28/2010	5:54:21 PM	SiCl4 post valve closed
7/28/2010	5:54:21 PM	Bubbler valve closed
7/28/2010	5:54:21 PM	Helium valve opened
7/28/2010	5:54:21 PM	Main Vac valve opened
7/28/2010	5:54:21 PM	Bypass valve opened
7/28/2010	5:54:21 PM	Helium MFC set to  100.000000
7/28/2010	5:54:21 PM	H2 MFC set to  0.000000
7/28/2010	5:54:21 PM	BCl3 MFC set to  0.000000
7/28/2010	5:54:21 PM	PHl3 MFC set to  0.000000
7/28/2010	5:54:21 PM	SiCl4 MFC set to  0.000000
7/28/2010	5:54:21 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	5:54:21 PM	Tube furnace set to 0
7/28/2010	5:54:23 PM	Helium valve closed
7/28/2010	5:54:23 PM	H2 valve closed
7/28/2010	5:54:23 PM	BCl3 valve closed
7/28/2010	5:54:23 PM	PH3 valve closed
7/28/2010	5:54:23 PM	SiCl4 pre valve closed
7/28/2010	5:54:23 PM	SiCl4 post valve closed
7/28/2010	5:54:23 PM	Bubbler valve closed
7/28/2010	5:54:23 PM	Main Vac valve opened
7/28/2010	5:54:23 PM	Bypass valve opened
7/28/2010	5:54:23 PM	Helium MFC set to  0.000000
7/28/2010	5:54:23 PM	H2 MFC set to  0.000000
7/28/2010	5:54:23 PM	BCl3 MFC set to  0.000000
7/28/2010	5:54:23 PM	PHl3 MFC set to  0.000000
7/28/2010	5:54:23 PM	SiCl4 MFC set to  0.000000
7/28/2010	5:54:23 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	5:54:23 PM	Tube furnace set to 0
7/28/2010	5:54:24 PM	Run finished at 5:54 PM
7/28/2010	5:54:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/28/2010	5:56:28 PM	Helium MFC set to  75.000000
7/28/2010	5:56:28 PM	Helium valve opened
7/28/2010	6:46:25 PM	Helium valve closed
7/28/2010	6:47:27 PM	Recipe started at 6:47 PM
7/28/2010	6:47:27 PM	Helium valve closed
7/28/2010	6:47:27 PM	BCl3 valve closed
7/28/2010	6:47:27 PM	PH3 valve closed
7/28/2010	6:47:27 PM	SiCl4 pre valve closed
7/28/2010	6:47:27 PM	SiCl4 post valve closed
7/28/2010	6:47:27 PM	Main Vac valve closed
7/28/2010	6:47:27 PM	Bypass valve closed
7/28/2010	6:47:27 PM	Bubbler valve closed
7/28/2010	6:47:27 PM	H2 valve opened
7/28/2010	6:47:27 PM	Helium MFC set to  0.000000
7/28/2010	6:47:27 PM	H2 MFC set to  500.000000
7/28/2010	6:47:27 PM	BCl3 MFC set to  0.000000
7/28/2010	6:47:27 PM	PHl3 MFC set to  0.000000
7/28/2010	6:47:27 PM	SiCl4 MFC set to  0.000000
7/28/2010	6:47:27 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	6:47:27 PM	Tube furnace set to 100
7/28/2010	6:48:50 PM	Helium valve closed
7/28/2010	6:48:50 PM	BCl3 valve closed
7/28/2010	6:48:50 PM	PH3 valve closed
7/28/2010	6:48:50 PM	SiCl4 pre valve closed
7/28/2010	6:48:50 PM	SiCl4 post valve closed
7/28/2010	6:48:50 PM	Main Vac valve closed
7/28/2010	6:48:50 PM	Bypass valve closed
7/28/2010	6:48:50 PM	H2 valve opened
7/28/2010	6:48:50 PM	Bubbler valve opened
7/28/2010	6:48:50 PM	Helium MFC set to  0.000000
7/28/2010	6:48:50 PM	H2 MFC set to  500.000000
7/28/2010	6:48:50 PM	BCl3 MFC set to  0.000000
7/28/2010	6:48:50 PM	PHl3 MFC set to  0.000000
7/28/2010	6:48:50 PM	SiCl4 MFC set to  0.000000
7/28/2010	6:48:50 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	6:48:50 PM	Tube furnace set to 1000
7/28/2010	7:08:50 PM	Helium valve closed
7/28/2010	7:08:50 PM	BCl3 valve closed
7/28/2010	7:08:50 PM	PH3 valve closed
7/28/2010	7:08:50 PM	Main Vac valve closed
7/28/2010	7:08:50 PM	Bypass valve closed
7/28/2010	7:08:50 PM	H2 valve opened
7/28/2010	7:08:50 PM	SiCl4 pre valve opened
7/28/2010	7:08:50 PM	SiCl4 post valve opened
7/28/2010	7:08:50 PM	Bubbler valve opened
7/28/2010	7:08:50 PM	Helium MFC set to  0.000000
7/28/2010	7:08:50 PM	H2 MFC set to  500.000000
7/28/2010	7:08:50 PM	BCl3 MFC set to  0.000000
7/28/2010	7:08:50 PM	PHl3 MFC set to  0.000000
7/28/2010	7:08:50 PM	SiCl4 MFC set to  50.000000
7/28/2010	7:08:50 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	7:08:50 PM	Tube furnace set to 1000
7/28/2010	7:33:50 PM	H2 valve closed
7/28/2010	7:33:50 PM	BCl3 valve closed
7/28/2010	7:33:50 PM	PH3 valve closed
7/28/2010	7:33:50 PM	SiCl4 pre valve closed
7/28/2010	7:33:50 PM	SiCl4 post valve closed
7/28/2010	7:33:50 PM	Main Vac valve closed
7/28/2010	7:33:50 PM	Bypass valve closed
7/28/2010	7:33:50 PM	Helium valve opened
7/28/2010	7:33:50 PM	Bubbler valve opened
7/28/2010	7:33:50 PM	Helium MFC set to  500.000000
7/28/2010	7:33:50 PM	H2 MFC set to  0.000000
7/28/2010	7:33:50 PM	BCl3 MFC set to  0.000000
7/28/2010	7:33:50 PM	PHl3 MFC set to  0.000000
7/28/2010	7:33:50 PM	SiCl4 MFC set to  0.000000
7/28/2010	7:33:50 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	7:33:50 PM	Tube furnace set to 0
7/28/2010	8:07:10 PM	Helium valve closed
7/28/2010	8:07:10 PM	H2 valve closed
7/28/2010	8:07:10 PM	BCl3 valve closed
7/28/2010	8:07:10 PM	PH3 valve closed
7/28/2010	8:07:10 PM	SiCl4 pre valve closed
7/28/2010	8:07:10 PM	SiCl4 post valve closed
7/28/2010	8:07:10 PM	Main Vac valve closed
7/28/2010	8:07:10 PM	Bypass valve closed
7/28/2010	8:07:10 PM	Bubbler valve closed
7/28/2010	8:07:10 PM	Helium MFC set to  0.000000
7/28/2010	8:07:10 PM	H2 MFC set to  0.000000
7/28/2010	8:07:10 PM	BCl3 MFC set to  0.000000
7/28/2010	8:07:10 PM	PHl3 MFC set to  0.000000
7/28/2010	8:07:10 PM	SiCl4 MFC set to  0.000000
7/28/2010	8:07:10 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	8:07:10 PM	Tube furnace set to 0
7/28/2010	8:07:11 PM	Run finished at 8:07 PM
7/28/2010	8:28:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/28/2010	8:28:49 PM	Recipe started at 8:28 PM
7/28/2010	8:28:49 PM	Helium valve closed
7/28/2010	8:28:49 PM	H2 valve closed
7/28/2010	8:28:49 PM	BCl3 valve closed
7/28/2010	8:28:49 PM	PH3 valve closed
7/28/2010	8:28:49 PM	SiCl4 pre valve closed
7/28/2010	8:28:49 PM	SiCl4 post valve closed
7/28/2010	8:28:49 PM	Main Vac valve closed
7/28/2010	8:28:49 PM	Bubbler valve closed
7/28/2010	8:28:49 PM	Bypass valve opened
7/28/2010	8:28:49 PM	Helium MFC set to  0.000000
7/28/2010	8:28:49 PM	H2 MFC set to  0.000000
7/28/2010	8:28:49 PM	BCl3 MFC set to  0.000000
7/28/2010	8:28:49 PM	PHl3 MFC set to  0.000000
7/28/2010	8:28:49 PM	SiCl4 MFC set to  0.000000
7/28/2010	8:28:49 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	8:28:49 PM	Tube furnace set to 0
7/28/2010	8:29:27 PM	Helium valve closed
7/28/2010	8:29:27 PM	H2 valve closed
7/28/2010	8:29:27 PM	BCl3 valve closed
7/28/2010	8:29:27 PM	PH3 valve closed
7/28/2010	8:29:27 PM	SiCl4 pre valve closed
7/28/2010	8:29:27 PM	SiCl4 post valve closed
7/28/2010	8:29:27 PM	Bubbler valve closed
7/28/2010	8:29:27 PM	Main Vac valve opened
7/28/2010	8:29:27 PM	Bypass valve opened
7/28/2010	8:29:27 PM	Helium MFC set to  0.000000
7/28/2010	8:29:27 PM	H2 MFC set to  0.000000
7/28/2010	8:29:27 PM	BCl3 MFC set to  0.000000
7/28/2010	8:29:27 PM	PHl3 MFC set to  0.000000
7/28/2010	8:29:27 PM	SiCl4 MFC set to  0.000000
7/28/2010	8:29:27 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	8:29:27 PM	Tube furnace set to 0
7/28/2010	8:30:27 PM	H2 valve closed
7/28/2010	8:30:27 PM	BCl3 valve closed
7/28/2010	8:30:27 PM	PH3 valve closed
7/28/2010	8:30:27 PM	SiCl4 pre valve closed
7/28/2010	8:30:27 PM	SiCl4 post valve closed
7/28/2010	8:30:27 PM	Bubbler valve closed
7/28/2010	8:30:27 PM	Helium valve opened
7/28/2010	8:30:27 PM	Main Vac valve opened
7/28/2010	8:30:27 PM	Bypass valve opened
7/28/2010	8:30:27 PM	Helium MFC set to  100.000000
7/28/2010	8:30:27 PM	H2 MFC set to  0.000000
7/28/2010	8:30:27 PM	BCl3 MFC set to  0.000000
7/28/2010	8:30:27 PM	PHl3 MFC set to  0.000000
7/28/2010	8:30:27 PM	SiCl4 MFC set to  0.000000
7/28/2010	8:30:27 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	8:30:27 PM	Tube furnace set to 0
7/28/2010	8:39:27 PM	Helium valve closed
7/28/2010	8:39:27 PM	H2 valve closed
7/28/2010	8:39:27 PM	BCl3 valve closed
7/28/2010	8:39:27 PM	PH3 valve closed
7/28/2010	8:39:27 PM	SiCl4 pre valve closed
7/28/2010	8:39:27 PM	SiCl4 post valve closed
7/28/2010	8:39:27 PM	Bubbler valve closed
7/28/2010	8:39:27 PM	Main Vac valve opened
7/28/2010	8:39:27 PM	Bypass valve opened
7/28/2010	8:39:27 PM	Helium MFC set to  0.000000
7/28/2010	8:39:27 PM	H2 MFC set to  0.000000
7/28/2010	8:39:27 PM	BCl3 MFC set to  0.000000
7/28/2010	8:39:27 PM	PHl3 MFC set to  0.000000
7/28/2010	8:39:27 PM	SiCl4 MFC set to  0.000000
7/28/2010	8:39:27 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	8:39:27 PM	Tube furnace set to 0
7/28/2010	8:40:27 PM	H2 valve closed
7/28/2010	8:40:27 PM	BCl3 valve closed
7/28/2010	8:40:27 PM	PH3 valve closed
7/28/2010	8:40:27 PM	SiCl4 pre valve closed
7/28/2010	8:40:27 PM	SiCl4 post valve closed
7/28/2010	8:40:27 PM	Bubbler valve closed
7/28/2010	8:40:27 PM	Helium valve opened
7/28/2010	8:40:27 PM	Main Vac valve opened
7/28/2010	8:40:27 PM	Bypass valve opened
7/28/2010	8:40:27 PM	Helium MFC set to  100.000000
7/28/2010	8:40:27 PM	H2 MFC set to  0.000000
7/28/2010	8:40:27 PM	BCl3 MFC set to  0.000000
7/28/2010	8:40:27 PM	PHl3 MFC set to  0.000000
7/28/2010	8:40:27 PM	SiCl4 MFC set to  0.000000
7/28/2010	8:40:27 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	8:40:27 PM	Tube furnace set to 0
7/28/2010	8:49:27 PM	Helium valve closed
7/28/2010	8:49:27 PM	H2 valve closed
7/28/2010	8:49:27 PM	BCl3 valve closed
7/28/2010	8:49:27 PM	PH3 valve closed
7/28/2010	8:49:27 PM	SiCl4 pre valve closed
7/28/2010	8:49:27 PM	SiCl4 post valve closed
7/28/2010	8:49:27 PM	Bubbler valve closed
7/28/2010	8:49:27 PM	Main Vac valve opened
7/28/2010	8:49:27 PM	Bypass valve opened
7/28/2010	8:49:27 PM	Helium MFC set to  0.000000
7/28/2010	8:49:27 PM	H2 MFC set to  0.000000
7/28/2010	8:49:27 PM	BCl3 MFC set to  0.000000
7/28/2010	8:49:27 PM	PHl3 MFC set to  0.000000
7/28/2010	8:49:27 PM	SiCl4 MFC set to  0.000000
7/28/2010	8:49:27 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	8:49:28 PM	Tube furnace set to 0
7/28/2010	8:50:28 PM	H2 valve closed
7/28/2010	8:50:28 PM	BCl3 valve closed
7/28/2010	8:50:28 PM	PH3 valve closed
7/28/2010	8:50:28 PM	SiCl4 pre valve closed
7/28/2010	8:50:28 PM	SiCl4 post valve closed
7/28/2010	8:50:28 PM	Bubbler valve closed
7/28/2010	8:50:28 PM	Helium valve opened
7/28/2010	8:50:28 PM	Main Vac valve opened
7/28/2010	8:50:28 PM	Bypass valve opened
7/28/2010	8:50:28 PM	Helium MFC set to  100.000000
7/28/2010	8:50:28 PM	H2 MFC set to  0.000000
7/28/2010	8:50:28 PM	BCl3 MFC set to  0.000000
7/28/2010	8:50:28 PM	PHl3 MFC set to  0.000000
7/28/2010	8:50:28 PM	SiCl4 MFC set to  0.000000
7/28/2010	8:50:28 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	8:50:28 PM	Tube furnace set to 0
7/28/2010	8:56:34 PM	Helium valve closed
7/28/2010	8:56:34 PM	H2 valve closed
7/28/2010	8:56:34 PM	BCl3 valve closed
7/28/2010	8:56:34 PM	PH3 valve closed
7/28/2010	8:56:34 PM	SiCl4 pre valve closed
7/28/2010	8:56:34 PM	SiCl4 post valve closed
7/28/2010	8:56:34 PM	Bubbler valve closed
7/28/2010	8:56:34 PM	Main Vac valve opened
7/28/2010	8:56:34 PM	Bypass valve opened
7/28/2010	8:56:34 PM	Helium MFC set to  0.000000
7/28/2010	8:56:34 PM	H2 MFC set to  0.000000
7/28/2010	8:56:34 PM	BCl3 MFC set to  0.000000
7/28/2010	8:56:34 PM	PHl3 MFC set to  0.000000
7/28/2010	8:56:34 PM	SiCl4 MFC set to  0.000000
7/28/2010	8:56:34 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	8:56:34 PM	Tube furnace set to 0
7/28/2010	8:56:35 PM	Run finished at 8:56 PM
7/28/2010	8:56:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/28/2010	8:56:40 PM	Helium MFC set to  75.000000
7/28/2010	8:56:41 PM	Helium valve opened
7/28/2010	9:07:35 PM	Helium valve closed
7/28/2010	9:09:08 PM	Recipe started at 9:09 PM
7/28/2010	9:09:08 PM	Helium valve closed
7/28/2010	9:09:08 PM	BCl3 valve closed
7/28/2010	9:09:08 PM	PH3 valve closed
7/28/2010	9:09:08 PM	SiCl4 pre valve closed
7/28/2010	9:09:08 PM	SiCl4 post valve closed
7/28/2010	9:09:08 PM	Main Vac valve closed
7/28/2010	9:09:08 PM	Bypass valve closed
7/28/2010	9:09:08 PM	Bubbler valve closed
7/28/2010	9:09:08 PM	H2 valve opened
7/28/2010	9:09:08 PM	Helium MFC set to  0.000000
7/28/2010	9:09:08 PM	H2 MFC set to  500.000000
7/28/2010	9:09:08 PM	BCl3 MFC set to  0.000000
7/28/2010	9:09:08 PM	PHl3 MFC set to  0.000000
7/28/2010	9:09:08 PM	SiCl4 MFC set to  0.000000
7/28/2010	9:09:08 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	9:09:08 PM	Tube furnace set to 100
7/28/2010	9:10:31 PM	Helium valve closed
7/28/2010	9:10:31 PM	BCl3 valve closed
7/28/2010	9:10:31 PM	PH3 valve closed
7/28/2010	9:10:31 PM	SiCl4 pre valve closed
7/28/2010	9:10:31 PM	SiCl4 post valve closed
7/28/2010	9:10:31 PM	Main Vac valve closed
7/28/2010	9:10:31 PM	Bypass valve closed
7/28/2010	9:10:31 PM	H2 valve opened
7/28/2010	9:10:31 PM	Bubbler valve opened
7/28/2010	9:10:31 PM	Helium MFC set to  0.000000
7/28/2010	9:10:31 PM	H2 MFC set to  500.000000
7/28/2010	9:10:31 PM	BCl3 MFC set to  0.000000
7/28/2010	9:10:31 PM	PHl3 MFC set to  0.000000
7/28/2010	9:10:31 PM	SiCl4 MFC set to  0.000000
7/28/2010	9:10:31 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	9:10:31 PM	Tube furnace set to 1000
7/28/2010	9:30:31 PM	Helium valve closed
7/28/2010	9:30:31 PM	BCl3 valve closed
7/28/2010	9:30:31 PM	PH3 valve closed
7/28/2010	9:30:31 PM	Main Vac valve closed
7/28/2010	9:30:31 PM	Bypass valve closed
7/28/2010	9:30:31 PM	H2 valve opened
7/28/2010	9:30:31 PM	SiCl4 pre valve opened
7/28/2010	9:30:31 PM	SiCl4 post valve opened
7/28/2010	9:30:31 PM	Bubbler valve opened
7/28/2010	9:30:31 PM	Helium MFC set to  0.000000
7/28/2010	9:30:31 PM	H2 MFC set to  500.000000
7/28/2010	9:30:31 PM	BCl3 MFC set to  0.000000
7/28/2010	9:30:31 PM	PHl3 MFC set to  0.000000
7/28/2010	9:30:31 PM	SiCl4 MFC set to  50.000000
7/28/2010	9:30:31 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	9:30:31 PM	Tube furnace set to 1000
7/28/2010	9:55:31 PM	H2 valve closed
7/28/2010	9:55:31 PM	BCl3 valve closed
7/28/2010	9:55:31 PM	PH3 valve closed
7/28/2010	9:55:31 PM	SiCl4 pre valve closed
7/28/2010	9:55:31 PM	SiCl4 post valve closed
7/28/2010	9:55:31 PM	Main Vac valve closed
7/28/2010	9:55:31 PM	Bypass valve closed
7/28/2010	9:55:31 PM	Helium valve opened
7/28/2010	9:55:31 PM	Bubbler valve opened
7/28/2010	9:55:31 PM	Helium MFC set to  500.000000
7/28/2010	9:55:31 PM	H2 MFC set to  0.000000
7/28/2010	9:55:31 PM	BCl3 MFC set to  0.000000
7/28/2010	9:55:31 PM	PHl3 MFC set to  0.000000
7/28/2010	9:55:31 PM	SiCl4 MFC set to  0.000000
7/28/2010	9:55:31 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	9:55:31 PM	Tube furnace set to 0
7/28/2010	10:28:51 PM	Helium valve closed
7/28/2010	10:28:51 PM	H2 valve closed
7/28/2010	10:28:51 PM	BCl3 valve closed
7/28/2010	10:28:51 PM	PH3 valve closed
7/28/2010	10:28:51 PM	SiCl4 pre valve closed
7/28/2010	10:28:51 PM	SiCl4 post valve closed
7/28/2010	10:28:51 PM	Main Vac valve closed
7/28/2010	10:28:51 PM	Bypass valve closed
7/28/2010	10:28:51 PM	Bubbler valve closed
7/28/2010	10:28:51 PM	Helium MFC set to  0.000000
7/28/2010	10:28:51 PM	H2 MFC set to  0.000000
7/28/2010	10:28:51 PM	BCl3 MFC set to  0.000000
7/28/2010	10:28:51 PM	PHl3 MFC set to  0.000000
7/28/2010	10:28:51 PM	SiCl4 MFC set to  0.000000
7/28/2010	10:28:51 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	10:28:51 PM	Tube furnace set to 0
7/28/2010	10:28:51 PM	Run finished at 10:28 PM
7/28/2010	10:57:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/28/2010	10:57:21 PM	Recipe started at 10:57 PM
7/28/2010	10:57:21 PM	Helium valve closed
7/28/2010	10:57:21 PM	H2 valve closed
7/28/2010	10:57:21 PM	BCl3 valve closed
7/28/2010	10:57:21 PM	PH3 valve closed
7/28/2010	10:57:21 PM	SiCl4 pre valve closed
7/28/2010	10:57:21 PM	SiCl4 post valve closed
7/28/2010	10:57:21 PM	Main Vac valve closed
7/28/2010	10:57:21 PM	Bubbler valve closed
7/28/2010	10:57:21 PM	Bypass valve opened
7/28/2010	10:57:21 PM	Helium MFC set to  0.000000
7/28/2010	10:57:21 PM	H2 MFC set to  0.000000
7/28/2010	10:57:21 PM	BCl3 MFC set to  0.000000
7/28/2010	10:57:21 PM	PHl3 MFC set to  0.000000
7/28/2010	10:57:21 PM	SiCl4 MFC set to  0.000000
7/28/2010	10:57:21 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	10:57:21 PM	Tube furnace set to 0
7/28/2010	10:57:59 PM	Helium valve closed
7/28/2010	10:57:59 PM	H2 valve closed
7/28/2010	10:57:59 PM	BCl3 valve closed
7/28/2010	10:57:59 PM	PH3 valve closed
7/28/2010	10:57:59 PM	SiCl4 pre valve closed
7/28/2010	10:57:59 PM	SiCl4 post valve closed
7/28/2010	10:57:59 PM	Bubbler valve closed
7/28/2010	10:57:59 PM	Main Vac valve opened
7/28/2010	10:57:59 PM	Bypass valve opened
7/28/2010	10:57:59 PM	Helium MFC set to  0.000000
7/28/2010	10:57:59 PM	H2 MFC set to  0.000000
7/28/2010	10:57:59 PM	BCl3 MFC set to  0.000000
7/28/2010	10:57:59 PM	PHl3 MFC set to  0.000000
7/28/2010	10:57:59 PM	SiCl4 MFC set to  0.000000
7/28/2010	10:57:59 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	10:57:59 PM	Tube furnace set to 0
7/28/2010	10:58:59 PM	H2 valve closed
7/28/2010	10:58:59 PM	BCl3 valve closed
7/28/2010	10:58:59 PM	PH3 valve closed
7/28/2010	10:58:59 PM	SiCl4 pre valve closed
7/28/2010	10:58:59 PM	SiCl4 post valve closed
7/28/2010	10:58:59 PM	Bubbler valve closed
7/28/2010	10:58:59 PM	Helium valve opened
7/28/2010	10:58:59 PM	Main Vac valve opened
7/28/2010	10:58:59 PM	Bypass valve opened
7/28/2010	10:58:59 PM	Helium MFC set to  100.000000
7/28/2010	10:58:59 PM	H2 MFC set to  0.000000
7/28/2010	10:58:59 PM	BCl3 MFC set to  0.000000
7/28/2010	10:58:59 PM	PHl3 MFC set to  0.000000
7/28/2010	10:58:59 PM	SiCl4 MFC set to  0.000000
7/28/2010	10:58:59 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	10:58:59 PM	Tube furnace set to 0
7/28/2010	11:07:59 PM	Helium valve closed
7/28/2010	11:07:59 PM	H2 valve closed
7/28/2010	11:07:59 PM	BCl3 valve closed
7/28/2010	11:07:59 PM	PH3 valve closed
7/28/2010	11:07:59 PM	SiCl4 pre valve closed
7/28/2010	11:07:59 PM	SiCl4 post valve closed
7/28/2010	11:07:59 PM	Bubbler valve closed
7/28/2010	11:07:59 PM	Main Vac valve opened
7/28/2010	11:07:59 PM	Bypass valve opened
7/28/2010	11:07:59 PM	Helium MFC set to  0.000000
7/28/2010	11:07:59 PM	H2 MFC set to  0.000000
7/28/2010	11:07:59 PM	BCl3 MFC set to  0.000000
7/28/2010	11:07:59 PM	PHl3 MFC set to  0.000000
7/28/2010	11:07:59 PM	SiCl4 MFC set to  0.000000
7/28/2010	11:07:59 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	11:07:59 PM	Tube furnace set to 0
7/28/2010	11:08:59 PM	H2 valve closed
7/28/2010	11:08:59 PM	BCl3 valve closed
7/28/2010	11:08:59 PM	PH3 valve closed
7/28/2010	11:08:59 PM	SiCl4 pre valve closed
7/28/2010	11:08:59 PM	SiCl4 post valve closed
7/28/2010	11:08:59 PM	Bubbler valve closed
7/28/2010	11:08:59 PM	Helium valve opened
7/28/2010	11:08:59 PM	Main Vac valve opened
7/28/2010	11:08:59 PM	Bypass valve opened
7/28/2010	11:08:59 PM	Helium MFC set to  100.000000
7/28/2010	11:08:59 PM	H2 MFC set to  0.000000
7/28/2010	11:08:59 PM	BCl3 MFC set to  0.000000
7/28/2010	11:08:59 PM	PHl3 MFC set to  0.000000
7/28/2010	11:08:59 PM	SiCl4 MFC set to  0.000000
7/28/2010	11:08:59 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	11:09:00 PM	Tube furnace set to 0
7/28/2010	11:18:00 PM	Helium valve closed
7/28/2010	11:18:00 PM	H2 valve closed
7/28/2010	11:18:00 PM	BCl3 valve closed
7/28/2010	11:18:00 PM	PH3 valve closed
7/28/2010	11:18:00 PM	SiCl4 pre valve closed
7/28/2010	11:18:00 PM	SiCl4 post valve closed
7/28/2010	11:18:00 PM	Bubbler valve closed
7/28/2010	11:18:00 PM	Main Vac valve opened
7/28/2010	11:18:00 PM	Bypass valve opened
7/28/2010	11:18:00 PM	Helium MFC set to  0.000000
7/28/2010	11:18:00 PM	H2 MFC set to  0.000000
7/28/2010	11:18:00 PM	BCl3 MFC set to  0.000000
7/28/2010	11:18:00 PM	PHl3 MFC set to  0.000000
7/28/2010	11:18:00 PM	SiCl4 MFC set to  0.000000
7/28/2010	11:18:00 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	11:18:00 PM	Tube furnace set to 0
7/28/2010	11:19:00 PM	H2 valve closed
7/28/2010	11:19:00 PM	BCl3 valve closed
7/28/2010	11:19:00 PM	PH3 valve closed
7/28/2010	11:19:00 PM	SiCl4 pre valve closed
7/28/2010	11:19:00 PM	SiCl4 post valve closed
7/28/2010	11:19:00 PM	Bubbler valve closed
7/28/2010	11:19:00 PM	Helium valve opened
7/28/2010	11:19:00 PM	Main Vac valve opened
7/28/2010	11:19:00 PM	Bypass valve opened
7/28/2010	11:19:00 PM	Helium MFC set to  100.000000
7/28/2010	11:19:00 PM	H2 MFC set to  0.000000
7/28/2010	11:19:00 PM	BCl3 MFC set to  0.000000
7/28/2010	11:19:00 PM	PHl3 MFC set to  0.000000
7/28/2010	11:19:00 PM	SiCl4 MFC set to  0.000000
7/28/2010	11:19:00 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	11:19:00 PM	Tube furnace set to 0
7/28/2010	11:28:00 PM	Helium valve closed
7/28/2010	11:28:00 PM	H2 valve closed
7/28/2010	11:28:00 PM	BCl3 valve closed
7/28/2010	11:28:00 PM	PH3 valve closed
7/28/2010	11:28:00 PM	SiCl4 pre valve closed
7/28/2010	11:28:00 PM	SiCl4 post valve closed
7/28/2010	11:28:00 PM	Bubbler valve closed
7/28/2010	11:28:00 PM	Main Vac valve opened
7/28/2010	11:28:00 PM	Bypass valve opened
7/28/2010	11:28:00 PM	Helium MFC set to  0.000000
7/28/2010	11:28:00 PM	H2 MFC set to  0.000000
7/28/2010	11:28:00 PM	BCl3 MFC set to  0.000000
7/28/2010	11:28:00 PM	PHl3 MFC set to  0.000000
7/28/2010	11:28:00 PM	SiCl4 MFC set to  0.000000
7/28/2010	11:28:00 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	11:28:00 PM	Tube furnace set to 0
7/28/2010	11:28:01 PM	Run finished at 11:28 PM
7/28/2010	11:28:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/28/2010	11:42:27 PM	Helium MFC set to  75.000000
7/28/2010	11:42:28 PM	Helium valve opened
7/28/2010	11:55:10 PM	Helium valve closed
7/28/2010	11:56:58 PM	Recipe started at 11:56 PM
7/28/2010	11:56:58 PM	Helium valve closed
7/28/2010	11:56:58 PM	BCl3 valve closed
7/28/2010	11:56:58 PM	PH3 valve closed
7/28/2010	11:56:58 PM	SiCl4 pre valve closed
7/28/2010	11:56:58 PM	SiCl4 post valve closed
7/28/2010	11:56:58 PM	Main Vac valve closed
7/28/2010	11:56:58 PM	Bypass valve closed
7/28/2010	11:56:58 PM	Bubbler valve closed
7/28/2010	11:56:58 PM	H2 valve opened
7/28/2010	11:56:58 PM	Helium MFC set to  0.000000
7/28/2010	11:56:58 PM	H2 MFC set to  500.000000
7/28/2010	11:56:58 PM	BCl3 MFC set to  0.000000
7/28/2010	11:56:58 PM	PHl3 MFC set to  0.000000
7/28/2010	11:56:58 PM	SiCl4 MFC set to  0.000000
7/28/2010	11:56:58 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	11:56:58 PM	Tube furnace set to 100
7/28/2010	11:58:21 PM	Helium valve closed
7/28/2010	11:58:21 PM	BCl3 valve closed
7/28/2010	11:58:21 PM	PH3 valve closed
7/28/2010	11:58:21 PM	SiCl4 pre valve closed
7/28/2010	11:58:21 PM	SiCl4 post valve closed
7/28/2010	11:58:21 PM	Main Vac valve closed
7/28/2010	11:58:21 PM	Bypass valve closed
7/28/2010	11:58:21 PM	H2 valve opened
7/28/2010	11:58:21 PM	Bubbler valve opened
7/28/2010	11:58:21 PM	Helium MFC set to  0.000000
7/28/2010	11:58:21 PM	H2 MFC set to  500.000000
7/28/2010	11:58:21 PM	BCl3 MFC set to  0.000000
7/28/2010	11:58:21 PM	PHl3 MFC set to  0.000000
7/28/2010	11:58:21 PM	SiCl4 MFC set to  0.000000
7/28/2010	11:58:21 PM	Bypass solenoid MFC set to  0.000000
7/28/2010	11:58:21 PM	Tube furnace set to 1000
